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发表于 2024-6-19 22:50:22
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我来解答吧,很简单,就是高度累加误差导致的.
我也折腾了好久,终于解决了!!!!
要手动改:看懂下面我例子就ok了.
40.01 itf to icl
./itf_to_ict.pl ./StarRC_40LL_1P9M_2TM_CMAX.itf ./StarRC_40LL_1P9M_2TM_CMAX.ict
40.02 icl to qrc
Techgen -simulation -multi_cpu 8 ./StarRC_40LL_1P9M_2TM_CMAX.ict
如果报ERROR (EXTZTECH-213) : Error [input]: Layers ppoly and npoly in ICT file overlap.
都是高度累加value有问题,一定能要手动修改height值:
如果是poly要定义subconductor (因为不能设置厚度为0或者小于0的值,只有sub_conductor才有相同的height)
正确为:
conductor poly {
min_spacing 5.7600E-02
min_contact_poly_spacing 0.036
min_width 3.6000E-02
height 3.5000E-01
thickness 7.7000E-02
resistivity 1.6000E+01
temp_tc1 1.6600E-03
temp_tc2 -2.9500E-07
gate_forming_layer true
layer_type gate
sub_conductor npoly {
height 3.5000E-01
thickness 7.7000E-02
resistivity 1.6000E+01
temp_tc1 1.6600E-03
temp_tc2 -2.9500E-07
wire_edge_enlargement_c {
wee_widths 3.6000E-02
wee_spacings 5.7600E-02
wee_adjustments 0.0025
}
wire_edge_enlargement_r {
wee_widths 3.6000E-02
wee_spacings 5.7600E-02
wee_adjustments -0.0
}
}
sub_conductor ppoly {
height 3.5000E-01
thickness 7.7000E-02
resistivity 1.2820E+01
temp_tc1 1.9200E-03
temp_tc2 -3.4000E-07
wire_edge_enlargement_c {
wee_widths 3.6000E-02
wee_spacings 5.7600E-02
wee_adjustments 0.0025
}
wire_edge_enlargement_r {
wee_widths 3.6000E-02
wee_spacings 5.7600E-02
wee_adjustments 0.00376
}
}
}
错误为:
#conductor ppoly {
# min_spacing 5.7600E-02
# min_width 3.6000E-02
# height 0.352565
# thickness 7.7000E-02
# resistivity
# temp_tc1 1.9200E-03
# temp_tc2 -3.4000E-07
# gate_forming_layer true
# wire_edge_enlargement_c {
# wee_widths 3.6000E-02
# wee_spacings 5.7600E-02
# wee_adjustments 0.0025
# }
#}
#conductor npoly {
# min_spacing 5.7600E-02
# min_width 3.6000E-02
# height 0.352565
# thickness 7.7000E-02
# resistivity 1.6000E+01
# temp_tc1 1.6600E-03
# temp_tc2 -2.9500E-07
# gate_forming_layer false
# wire_edge_enlargement_c {
# wee_widths 3.6000E-02
# wee_spacings 5.7600E-02
# wee_adjustments 0.0025
# }
#}
另外也有报
ERROR (EXTZTECH-206) : Error [input]: Layers ILD1a and ILD1b1 are not touching.
因为下面:
dielectric ILD1a {
conformal TRUE
expandedFrom poly
height 0.3525
thickness 0.0380 ( -> changed to 0.0381 to pass check!!!)
topThickness 0.0380
sideExpand 0.0304
dielectric_constant 7.000
}
dielectric ILD1b1 {
conformal FALSE
height 0.3906 != 0.3525+0.0380=0.3905
thickness 0.1420
dielectric_constant 4.200
}
如上将高度height改成一样就可以,通常是改thickness,例如将ILD1a 的thickness 0.0380-> changed to 0.0381
都是因为厚度thickness精度误差导致的。
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