【dissertation】《Deep submicron CMOS VLSI circuit reliability modeling, ...》

gray_zhou

Deep submicron CMOS VLSI circuit reliability modeling, simulation and design

CONTENT：
1 Introduction 1
1.1 CMOS Scaling and New Reliability Challenges . . . . . . . . . . . . . 1
1.2 Purpose of the Dissertation . . . . . . . . . . . . . . . . . . . . . . . 4
1.3 Dissertation Organization and Chapter Overviews . . . . . . . . . . . 4
2 Simulation Models and Algorithms 10
2.1 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.2 Review of Reliability Simulation Tools . . . . . . . . . . . . . . . . . 12
2.2.1 Reliability Simulation in virtuoso UltraSim . . . . . . . . . . 12
2.2.2 Reliability Simulation in Eldo . . . . . . . . . . . . . . . . . . 14
2.3 Limitations and Improvements . . . . . . . . . . . . . . . . . . . . . . 17
2.4 Assumptions and Justi¯cation . . . . . . . . . . . . . . . . . . . . . . 22
2.5 Summary of Lifetime and Circuit Models . . . . . . . . . . . . . . . . 24
2.5.1 Hot Carrier Injection . . . . . . . . . . . . . . . . . . . . . . . 25
2.5.2 Time Dependent Dielectric Breakdown . . . . . . . . . . . . . 25
2.5.3 Negative Bias Temperature Instability . . . . . . . . . . . . . 27
2.6 Reliability Prediction and Simulation Algorithms . . . . . . . . . . . 29
2.6.1 Circuit Lifetime and Failure Rate Prediction . . . . . . . . . . 29
2.6.2 Circuit Reliability Simulation Algorithm . . . . . . . . . . . . 33
3 Hot Carrier Injection E®ect and Models 36
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.2 Accelerated Lifetime Model . . . . . . . . . . . . . . . . . . . . . . . 37
3.3 Failure Equivalent Circuit Model . . . . . . . . . . . . . . . . . . . . 43
3.4 Implementation in MaCRO . . . . . . . . . . . . . . . . . . . . . . . 52
3.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4 Time Dependent Dielectric Breakdown E®ect and Models 54
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.2 Accelerated Lifetime Model . . . . . . . . . . . . . . . . . . . . . . . 55
4.3 Failure Equivalent Circuit Model . . . . . . . . . . . . . . . . . . . . 62
4.4 Implementation in MaCRO . . . . . . . . . . . . . . . . . . . . . . . 76
4.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
5 Negative Bias Temperature Instability E®ect and Models 80
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.2 Accelerated Lifetime Model . . . . . . . . . . . . . . . . . . . . . . . 81
5.3 Failure Equivalent Circuit Model . . . . . . . . . . . . . . . . . . . . 90
5.4 Implementation in MaCRO . . . . . . . . . . . . . . . . . . . . . . . 94
5.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
6 Electromigration Lifetime Models and Parameter Extraction 98
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
6.2 Electromigration Failure Physics . . . . . . . . . . . . . . . . . . . . . 99
6.2.1 Nucleation-Dominated Failure Physics . . . . . . . . . . . . . 100
6.2.2 Growth-Dominated Failure Physics . . . . . . . . . . . . . . . 100
6.3 Electromigration Lifetime Models . . . . . . . . . . . . . . . . . . . . 101
6.4 Model Parameter Extraction . . . . . . . . . . . . . . . . . . . . . . . 102
6.4.1 Current Density . . . . . . . . . . . . . . . . . . . . . . . . . . 103
6.4.2 Current Acceleration Factor and Activation Energy . . . . . . 105
6.4.3 Temperature E®ects . . . . . . . . . . . . . . . . . . . . . . . 108
6.4.4 Example of Typical Values . . . . . . . . . . . . . . . . . . . . 110
6.5 Electromigration of Copper Wires . . . . . . . . . . . . . . . . . . . . 110
7 Derating Voltage and Temperature for Reliability 112
7.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
7.2 Circuit Design and Simulation . . . . . . . . . . . . . . . . . . . . . . 114
7.3 Simulation Results and Analysis . . . . . . . . . . . . . . . . . . . . . 115
7.3.1 Voltage Derating Analysis . . . . . . . . . . . . . . . . . . . . 115
7.3.2 Temperature Derating Analysis . . . . . . . . . . . . . . . . . 118
7.3.3 Voltage Transfer Analysis . . . . . . . . . . . . . . . . . . . . 122
7.4 Derating Model and Derating Factor . . . . . . . . . . . . . . . . . . 125
7.5 Derating Factor and Simulation . . . . . . . . . . . . . . . . . . . . . 128
7.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
8 SRAM Reliability Simulation and Analysis 132
8.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
8.2 SRAM Circuit Design and Simulation . . . . . . . . . . . . . . . . . . 133
8.3 Preview of SRAM Failure Behaviors . . . . . . . . . . . . . . . . . . . 138
8.4 Device Lifetime Calculation . . . . . . . . . . . . . . . . . . . . . . . 141
8.5 SPICE Reliability Simulation with Circuit Models . . . . . . . . . . . 145
8.5.1 HCI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
8.5.2 HCI+TDDB . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
8.5.3 HCI+TDDB+NBTI . . . . . . . . . . . . . . . . . . . . . . . 152
8.6 Reliability Design Techniques . . . . . . . . . . . . . . . . . . . . . . 157
8.7 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
9 Summary 159
9.1 Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159
9.2 Main Contributions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162
9.3 Future Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
A MATLAB Programs for Circuit Model Calculation 165
A.1 Hot Carrier Injection . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
A.2 Time Dependent Dielectric Breakdown . . . . . . . . . . . . . . . . . 166
A.3 Negative Bias Temperature Instability . . . . . . . . . . . . . . . . . 168

sun0714

a very good book, thanks for sharing!

sun0714

a very good book, thanks for sharing!

smartboy918

THANKS A LOT!

cschiu

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t01408

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hitpiano

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q1w2e3p0o9i8

thanks very much!!!!!!!

q1w2e3p0o9i8

thanks!!!!!

snsdw

谢谢分享！