Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

kofkoy2000 · 发表于 2013-9-21 19:46:13

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文中给出了一种采用CMOS工艺制备thermoelectric mirco generators的方法。工艺方法有借鉴作用，不过采用Al做刻蚀用的硬掩膜，会引出颗粒。
This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon strips. The output power of the generator depends on the temperature difference between the hot and cold parts in the thermocouples. In order to prevent heat-receiving in the cold part in the thermocouples, the cold part is covered with a silicon dioxide layer with low thermal conductivity to insulate the heat source. The hot part of the thermocouples is suspended and connected to an aluminum plate, to increases the heat-receiving area in the hot part. The generator requires a post-CMOS process to release the suspended structures. The post-CMOS process uses an anisotropic dry etching to remove the oxide sacrificial layer and an isotropic dry etching to etch the silicon substrate. Experimental results show that the micro generator has an output voltage of 67 μV at the temperature difference of 1 K.

pqzhu88 · 发表于 2013-10-8 08:56:24

正好需要~~!!支持支持，非常感谢

pqzhu88 · 发表于 2013-10-9 07:20:21

学习学习，长长见识，谢谢了

pqzhu88 · 发表于 2013-10-9 07:23:58

学习学习，长长见识，谢谢了

ralphtw · 发表于 2014-10-23 16:21:08

for mems !

ralphtw · 发表于 2014-11-21 12:36:31

mems fab !

haha2233 · 发表于 2016-4-9 05:48:13

Thanks

sydy110 · 发表于 2021-1-20 08:35:09

谢谢分享！

sydy110 · 发表于 2021-1-20 08:36:01

一篇论文，谢谢

agirl1314 · 发表于 2021-1-21 16:48:40

This is good for me. Thank you so much.

[资料] Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

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