求書..關於Atom Layer Deposition

cschiu

不知道站上的神人..誰有這本書..??
Amazon的資料如下..


書名:Atomic Layer Deposition for Nanotechnology
Product Details

• Hardcover: 256 pages
• Publisher: Ivoryton Press; First edition (June 16, 2008)
• Language: English
• ISBN-10: 0981466346
• ISBN-13: 978-0981466347

Product DescriptionThis monograph is the first text to review the subject of Atomic Layer Deposition (ALD) comprehensively. It not only covers its application to microelectronics, but also many important new and emerging applications in Nanotechnology. It is the culmination of over 10 years of pioneering research and development by the author. Not only does it cover thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides, but also reviews the formation of mixed and multilayer materials. Also, the newer radical enhanced technology is described and evaluated. Finally, the author presents some of the most recent applications of ALD to the emerging field of Nanotechnology. These include MEMS, solar cells, optical coatings, and organic/inorganic films among others. This treatment of an important and emerging technology will be particularly useful to engineers and scientists both in industry and universities.

About the AuthorDr. Sherman is a well known scientist working in the technology of Chemical Vapor Deposition. He has published extensively including many journal articles, book chapters, and the text Chemical Vapor Deposition for Microelectronics. He is also the holder of over ten patents. Industrial experience includes work at GE, RCA, Applied Materials, and Varian Associates.

kcat

I need that too

cschiu

我有掃描檔了..但是要切割 ..晚點再處理

benemale

那是相~~~~~~~~~~~~~~当的期待哦。。。。。。