MEMS Mechanical Sensors

semico_ljj

MEMS Mechanical Sensors

Preface
The field of microelectromechanical systems (MEMS), particularly micromachined
mechanical transducers, has been expanding over recent years, and the production
costs of these devices continue to fall. Using materials, fabrication processes, and
design tools originally developed for the microelectronic circuits industry, new
types of microengineered device are evolving all the time—many offering numerous
advantages over their traditional counterparts. The electrical properties of silicon
have been well understood for many years, but it is the mechanical properties that
have been exploited in many examples of MEMS. This book may seem slightly
unusual in that it has four editors. However, since we all work together in this field
within the School of Electronics and Computer Science at the University of Southampton,
it seemed natural to work together on a project like this. MEMS are now
appearing as part of the syllabus for both undergraduate and postgraduate courses
at many universities, and we hope that this book will complement the teaching that
is taking place in this area.
The prime objective of this book is to give an overview of MEMS mechanical
transducers. In order to achieve this, we provide some background information on
the various fabrication techniques and materials that can be used to make such
devices. The costs associated with the fabrication of MEMS can be very expensive,
and it is therefore essential to ensure a successful outcome from any specific production
or development run. Of course, this cannot be guaranteed, but through the use
of appropriate design tools and commercial simulation packages, the chances of
failure can be minimized. Packaging is an area that is sometimes overlooked in textbooks
on MEMS, and we therefore chose to provide coverage of some of the methods
used to provide the interface between the device and the outside world. The
book also provides a background to some of the basic principles associated with
micromachined mechanical transducers. The majority of the text, however, is dedicated
to specific examples of commercial and research devices, in addition to discussing
future possibilities.

semico_ljj

wang69

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qn1122

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qn1122

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lhyi

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hider123

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hider123

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jane_2008

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嘉禾95

有关于mems方面电路的资料吗？楼主