5nm 需要到多少MASK? 115 ?

andy2000a

5nm 需要到多少MASK ??

45NM  40 masklayers

为何如此多道 ? 那 40nm 下 metal layer 會多少

28nm device has 40 to 50 mask layers

为何如此多道 ?   metal layer 會多少

FROM TSMC

7 nm is roughly 87 masks,and 5 nm is back down to 81 masks

Without EUV, 5 nm would have been at 115masks

Others

5nm optical with 111 masklayers,. EUV with 70 mask layers.

5nm 会多少 metal layer  ?  是否前段DUV  后面 用 EUV ??

TSMC的5nm制程还会全面使用EUV，相比7nmEUV只使用4层EUV光罩，5nmEUV的光罩层数将提升到14-15层

ASML CEO Peter Wennink在财报会上指出，5nm制程采用的EUV光罩层数将超过10层，3nm制程采用的EUV光罩层数会超过20层，随着制程微缩EUV光罩层数会明显增加，并取代深紫外光（DUV）多重曝光制程。

thank you .