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发表于 2020-3-12 16:07:57
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Layout-Dependent Proximity Effects
in Deep Nanoscale CMOS
John Faricelli – April 16, 2009
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Electrical Variability due to Layout Dependent Effects:
Analysis, Quantification, and Mitigation on 40 and
28nm SOC Designs
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Lecture 12
Process-induced Variations II:
Systematic
– Lithographic Proximity Effect
– Layout Dependent Strain
– Well Proximity Effect
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