[EBOOK]An Introduction to MEMS Engineering(2nd)

rachel0131 · 发表于 2007-5-23 17:25:36

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Title: An Introduction to MEMS Engineering 2nd Edition 2004
Author:Nadim Maluf,Kirt Williams
Artech House, Inc.

rachel0131 · 发表于 2007-5-23 17:29:02

Contents
Foreword xiii
Preface xv
Preface to First Edition xix
CHAPTER 1
MEMS: A Technology from Lilliput
CHAPTER 2
Materials for MEMS
CHAPTER 3
Processes for Micromachining
CHAPTER 4
MEM Structures and Systems in Industrial and Automotive Applications
CHAPTER 5
MEM Structures and Systems in Photonic Applications
CHAPTER 6
MEMS Applications in Life Sciences
CHAPTER 7
MEM Structures and Systems in RF Applications
CHAPTER 8
Packaging and Reliability Considerations for MEMS
Glossary
About the Authors
Index