Finfet技术也带来了一些优点:
Better performance
ION increases substantially on a per unit area basis because channel surface extends into 3rd dimension.
FinFETs have potential performance benefits.
Reduced leakage current
Fully depleted devices have substantial sub-threshold leakage advantage and reduced short channel effects.
FinFETs enable less leaky and more interesting digital circuits.
Meet lower power requirement for mobile device
Voltage scaling
Steep sub-threshold slopes enables lower VTs for same or less leakage and therefore potential for voltage scaling
High density for area save