CMOS-MEMS Integration: Why, How and What?

kofkoy2000 · 发表于 2013-9-21 19:29:11

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CMOS和MEMS集成的一篇综述。但是文章题目过大，其实只提供了一种方案。
看看还是很有意思的。
CMOS-MEMS integration can improve the performance of the
MEMS (micro-electromechanical systems), allows for smaller
packages and leads to a lower packaging and instrumentation
cost. As argued in this article, processing MEMS above CMOS is
the most promising approach for CMOS-MEMS integration, but it
limits the thermal budget for MEMS processing. Poly-SiGe
provides the desired material properties for MEMS applications at
significantly lower temperatures compared to Poly-Si. A case
study of a CMOS-integrated SiGe gyroscope will be presented.

waveguides · 发表于 2013-9-29 11:11:57

谁写的。看题目颇有危言耸听的感觉，呵呵呵。

lss_945 · 发表于 2013-10-5 14:58:00

kkkkkkk

dosan0202 · 发表于 2014-4-20 09:44:51

网上又免费下载

kofkoy2000 · 发表于 2014-4-21 20:59:34

是啊，顺手收集来的。
回复 4# dosan0202

ralphtw · 发表于 2014-11-21 16:00:17

ref only !!!

Zhangshuan · 发表于 2020-6-11 03:26:57

谢谢分享

mscircuit · 发表于 2020-7-19 09:46:58

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student321 · 发表于 2020-7-19 20:03:22

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[资料] CMOS-MEMS Integration: Why, How and What?

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