求教silvaco学习问题

撩拨懵懂

跑了之后显示permission denied怎么办呢  求指教go atlas
mesh
#
x.m l=0.0 spacing=1.5
x.m l=4.0 spacing=1.5
x.m l=8.0 spacing=0.5
x.m l=11.0 spacing=0.2
x.m l=19.0 spacing=0.2
x.m l=22.0 spacing=0.5
x.m l=26.0 spacing=1.5
x.m l=30.0 spacing=1.5
#
y.m l=0.0 spacing=0.15
y.m l=0.15 spacing=0.2
y.m l=0.5 spacing=0.5
y.m l=2.0 spacing=1.5
y.m l=5.0 spacing=1.5
region num=1 material=silicon

electrode name=anode x.min=15 length=1 y.min=-0.5 y.max=0
electrode name=cathode x.min=5.5 length=1 y.min=-0.5 y.max=0
electrode name=cathode x.min=23.5 length=1 y.min=-0.5 y.max=0

#....p-epi doping
doping uniform p.type conc=1.21e15
#....dnw doping
doping uniform n.type conc=1.28e17 x.min=4 x.max=26 y.min=0.0 y.max=2.0
#....pw doping
doping uniform p.type conc=1e17 x.min=8 x.max=11 y.min=0.0 y.max=0.5
doping uniform p.type conc=1e17 x.min=19 x.max=22 y.min=0.0 y.max=0.5
#....p+ doping
doping uniform p.type conc=5e19 x.min=10 x.max=20 y.min=0.0 y.max=0.15
doping uniform p.type conc=5e19 x.min=1.5 x.max=2.5 y.min=0.0 y.max=0.15
doping uniform p.type conc=5e19 x.min=27.5 x.max=28.5 y.min=0.0 y.max=0.15
#....n+ doping
doping uniform n.type conc=5e19 x.min=5.5 x.max=6.5 y.min=0.0 y.max=0.15
doping uniform n.type conc=5e19 x.min=23.5 x.max=24.5 y.min=0.0 y.max=0.15
save outf=diode.str
#
model conmob fldmob srh optr auger bgn
impact selb
method newton trap maxtrap=10
contact name=anode
solve init
log outf=diode-IV.log master
solve vanode=-0.5 vstep=-1.0 vfinal=-10.0 name=anode
vstep=-0.5 vfinal=-17.0 name=anode
log off
save outf=diode-IV.str
tonyplot diode-IV.str-set diode-IV.set
tonyplot diode-IV.log-set diode-IV.set
quit