2013 Design and Analysis of Spiral Inductors

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Design and Analysis of Spiral Inductors  by Genemala Haobijam,
ISBN: 8132215141
2013



The book addresses the critical challenges faced by the ever-expanding wireless communication market and the increasing frequency of operation due to continuous innovation of high performance integrated passive devices. The challenges like low quality factor, design complexity, manufacturability, processing cost, etc., are studied with examples and specifics. Silicon on-chip inductor was first reported in 1990 by Nguyen and Meyer in a 0.8 μm silicon bipolar complementary metal oxide semiconductor technology (BiCMOS). Since then, there has been an enormous progress in the research on the performance trends, design and optimization, modeling, quality factor enhancement techniques, etc., of spiral inductors and significant results are reported in literature for various applications. This book introduces an efficient method of determining the optimized layout of on chip spiral inductor.

The important fundamental tradeoffs of the design like quality factor and area, quality factor and inductance, quality factor and operating frequency, maximum quality factor and the peak frequency is also explored. The authors proposed an algorithm for accurate design and optimization of spiral inductors using a 3D electromagnetic simulator with minimum number of inductor structure simulations and thereby reducing its long computation time. A new multilayer pyramidal symmetric inductor structure is also proposed in this book. Being multilevel, the proposed inductor achieves high inductance to area ratio and hence occupies smaller silicon area.

Contents
1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Silicon Integrated Passive Devices. . . . . . . . . . . . . . . . . . . . . . 1
1.2 On-Chip Inductor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.3 Review of Si On-Chip Inductor Design and Optimization . . . . . 9
1.3.1 Spiral Inductor Structures. . . . . . . . . . . . . . . . . . . . . . . 10
1.3.2 Quality Factor Enhancement Techniques . . . . . . . . . . . . 15
1.3.3 Inductor Design and Optimization Methods . . . . . . . . . . 16
1.4 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2 Optimization of Spiral Inductor with Bounding
of Layout Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.2 Bounding of Layout Parameters . . . . . . . . . . . . . . . . . . . . . . . 22
2.3 Performance Study of Fixed-Value Inductors Using
EM Simulator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.3.1 Area of the Inductor . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.3.2 Quality Factor Variation with the Number of Turns . . . . 30
2.3.3 Quality Factor Variation with the Metal Width. . . . . . . . 31
2.3.4 Quality Factor Variation with the Spacing Between
the Metal Tracks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2.4 Efficient Optimization with Bounding of Layout Parameters. . . . 36
2.4.1 Lumped Element Model of a Planar Spiral Inductor . . . . 37
2.4.2 Calculation of Figure of Merits. . . . . . . . . . . . . . . . . . . 38
2.4.3 Performance Evaluation with an Optimization
Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
2.4.4 Computational Speed. . . . . . . . . . . . . . . . . . . . . . . . . . 43
2.4.5 Global Optimal Quality Factor Tradeoff Curve. . . . . . . . 44
2.4.6 Peak Quality Factor Variation with Inductance . . . . . . . . 46
2.5 Optimization Using EM Simulator. . . . . . . . . . . . . . . . . . . . . . 46
2.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
xiii
3 Multilayer Pyramidal Symmetric Inductor . . . . . . . . . . . . . . . . . . 53
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.2 Design of MPS Inductor Structure . . . . . . . . . . . . . . . . . . . . . . 54
3.3 Lumped Element Model of the MPS Inductor Structure . . . . . . . 56
3.4 Parasitic Capacitance Calculation for Conventional
Multilayer Symmetric Inductor . . . . . . . . . . . . . . . . . . . . . . . . 60
3.5 Characterization of the MPS Inductor Structure. . . . . . . . . . . . . 64
3.5.1 Performance Trend of MPS Inductors . . . . . . . . . . . . . . 65
3.5.2 Comparison of MPS with Its Equivalent Planar
Inductor Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.5.3 Comparison of MPS with Multilayer Conventional
Symmetric and Asymmetric Stack Structures . . . . . . . . . 72
3.6 Experimental Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
3.6.1 Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
3.6.2 Layout of MPS Inductors . . . . . . . . . . . . . . . . . . . . . . . 76
3.6.3 Deembedding Process . . . . . . . . . . . . . . . . . . . . . . . . . 78
3.6.4 Measured Results and Discussion . . . . . . . . . . . . . . . . . 81
3.7 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
4 Implementation of the MPS in Voltage Controlled Oscillator . . . . 87
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
4.2 Passive Elements of the LC Tank . . . . . . . . . . . . . . . . . . . . . . 88
4.2.1 Inductor Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
4.2.2 Varactor Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
4.3 VCO Circuit Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
4.4 VCO Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
4.5 Measurement Results and Discussion . . . . . . . . . . . . . . . . . . . . 98
4.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
About the Author . . . . . . . . . . . . . . . . . .

nero007

brazavi

good, so great

wangjin0215

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fixit

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electronstar

下来看看

waveguides

正好用得着，多谢了

bing129

多谢楼主，感觉很不错的书

pargar

谢谢

wrzyred123

dinging