ATLAS对器件反向漏电流的模拟

xuhong1102

各位兄弟姐妹们，我来了！
      想请教一个问题：使用ATLAS模拟出来的器件反向漏电流是否真实？个人认为如下的程序模拟出来的只是器件的体漏电流，那么表面漏电流如何模拟出来呢？多谢！
       go athena
TITLE Predeposition Example
line x loc= 0.00  spac=2
line x loc= 5.00  spac=1
line x loc= 10.0  spac=2

line y loc= 00.00 spac=1
line y loc= 6.00 spac=1
line y loc= 8.00 spac=0.5
line y loc= 10.00 spac=0.1
line y loc= 15.00 spac=0.05
line y loc= 20.00 spac=0.02
line y loc= 25.00 spac=0.05
line y loc= 35.00 spac=0.1
line y loc= 40.00 spac=0.5
line y loc= 45.00 spac=1
line y loc= 50.00 spac=1
line y loc= 65.00 spac=2
line y loc= 100.00 spac=5
#line y loc= 125.00 spac=1

# Initialize silicon substrate
Init  silicon orient=111 c.boron=4.4E19 two.d
#Diffuse phos
Diffus Temperature=600 Time=128  T.rate=5 c.phos=1.7E21 Nitrogen
Diffus Temperature=1240 Time=240 c.phos=1.7e21 Nitrogen
Diffus Temperature=1240 Time=128 T.rate=-5 c.phos=1.7E21 Nitrogen
extract name="xj" xj material="Silicon" mat.occno=1 x.val=0 junc.occno=1
extract name="rho" sheet.res material="Silicon" mat.occno=1 x.val=0 region.occno=1
tonyplot
deposit alum thick=1 div=5
electrode name=anode x=5
electrode name=cathode bottom
structure outfile=dioex6_2.str
tonyplot dioex6_2.str -set dioex6_2.set
#quit
go atlas
output con.band val.band p.quantum band.temp E.velocity H.velocity E.MOBILITY  H.MOBILITY
models kla srh bgn auger fldmob  
impact selb

method newton trap maxtrap=10
solve init
      
method  newton  climit=1.e-4
solve vanode=0.1
curvetrace end.val=1e-5 contr.name=anode curr.cont mincur=5e-13 nextst.ratio=1.2 mindl=0.01 MAXDV1=0.01  MAXDV2=0.1
log outf=dioex3_0.log master
solve curvetrace
tonyplot dioex3_0.log -set dioex3_0_log.set
save  outf=dioex3_1.str
tonyplot dioex3_1.str -set dioex3_1.set