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SRAM Stability Analysis Considering Gate Oxide SBD, NBTI and HCI
ABSTRACT
For ultrathin gate oxide, soft breakdown (SBD) has been
extensively studied but not fully integrated into circuit reliability
simulation. Using a 6T SRAM cell as a generic circuit example, the
time-dependent SBD was incorporated into circuit degradation
analysis based on the exponential defect current growth model [1].
SRAM cell stability degradation due to individual failure mechanism
was characterized. Multiple failure mechanisms degradation effect
was also studied in regard of SRAM cell operation. Simulation
results showed that gate oxide SBD is the dominating failure
mechanism which causes SRAM stability and operation degradation,
NBTI and HCI have much less effect.
SRAM Stability Analysis Considering Gate Oxide SBD NBTI and HCI.pdf
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