Abstract --- This paper presents a high ESD
performance NPN protection structure for advanced
submicron BiCMOS and Bipolar processes. Using a
zener trigger circuit and a specific multi-emitter
layout technique, this paper successfully
demonstrates an optimal protection structure to meet
the requirements imposed on advanced submicron
circuit applications. The protection circuit has a low
trigger voltage as well as a low capacitance load and
does not add any series resistance.