SIN pullback

scu_lin · 发表于 2013-7-5 15:37:26

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本帖最后由 scu_lin 于 2013-7-5 15:49 编辑

做STI后为什么还要做SIN pullback？有的说是问了减小寄生效应，哪位给解释下，有图最好~

pdssb · 发表于 2013-7-8 16:26:30

也想问同一样的问题

rainfive · 发表于 2013-7-14 21:59:07

The SiN pull-back process is known for reducing "divot" around the top comer in conventional STI. It is also known that "divot" will degrade the inverse narrow width effect of pass transistor and result in "double hump". The SiN pull-back also can result in better data retention of DRAM than if without pull-back, but comparable to LOCOS and PB-STI.

汽车123 · 发表于 2013-7-15 20:25:57

我也是百思不得其解

Wade_Wen · 发表于 2013-8-7 21:21:52

用磷酸吃sin

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