1- linux system file technology has link file that it is not available in ntfs and fat system. you must not extract linux file in ntfs and fat!!!!
2- you must install unrar in linux
3a- right click in TSMC130_PDK.part001.rar and select extract.
3b- open terminal in tsmc path run this in terminal
unrar x TSMC130_PDK.part001.rar