The Science and Engineering of Microelectronic Fabrication

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Publisher:   Oxford University Press, USA
Number Of Pages:   624
Publication Date:   2001-02-15
ISBN-10 / ASIN:   0195136055
ISBN-13 / EAN:   9780195136050
Binding:   Hardcover
可惜是稍描版的，需要的再下吧！

Product Description:

Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in
this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced
processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of
integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of current state-of-the-art devices. Each chapter includes sample
problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face.
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining
etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST).

[ 本帖最后由 woainio 于 2008-5-20 11:17 编辑 ]

frzhang1

谢过了......

woainio

longgangtou

不错，只可惜是扫描，看起来吃力。

ahshima

扫描版的也下

ahshima

thanks

ahshima

已下完,谢谢

ahshima

longgangtou

请问楼主有没有答案下载？

feynmancgz

对学微电子的学生很有用