请教国内外120V BCD工艺的差距在哪里？

wzy319

比如GF,东部，国内的HHNEC，unt,SMIC?谢谢

peterlin2010

my friend use vis 200v process use ldmos  ok .
and porting HHNEC grace 200v process . find  hhnec  fail on HTOL ( breakdown ? burn out )


and some 500v~600v ldmos process

with other , "charge in wafer"  cause CP test fail ,
and next wafer , Fab fix this problem


for UHV process

vis   maybe you can use .

ethanchung

Different mask layers needed