手动创建EMX衬底文件结果差好多

linxin2018 · 发表于 2024-9-29 20:37:56

本帖最后由 linxin2018 于 2024-9-30 14:26 编辑

各位前辈好，我最近在研究怎么使用EMX进行电感仿真的问题，使用的是SMIC30nm工艺，手动建立的衬底文件如下，

# Comments start with '#' and continue to
# the end of the line

## Comments at the start of a line that
## begin with '##' are included in the
## output from --print-process

assume angstroms # lengths will be in microns

# These are the GDSII layers for the conductors
define GT = L30T0
define M1 = L61T0
define M2 = L62T0
define M3 = L63T0
define M4 = L64T0
define M5 = L65T0
define M6 = L66T0
define M7 = L67T0
define M8 = L68T0
define V4 = L73T0
define V5 = L74T0
define V6 = L75T0
define V7 = L76T0
define ALPA= L83T0

# Dielectrics and conductors
#缺失过孔信息与金属层电阻率，可以去TD-MM13-SP-2001下P112寻找方块电阻率
#需要考虑是

layer          4000 4.2


layer             150    5
      conductor  1750 7.85 ohm/sq GT
      offset 5100
      conductor  2600  0.11 ohm/sq M1
layer             300    7.0
layer             5500    4.2
layer             300    7
layer             1900    3.84
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M2
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M3
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M4
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M5
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M6
layer             500    7
layer             7100    3.84
      offset 7100-3850
      conductor  3850 0.065 ohm/sq M7
layer             700    7
layer             36300    4.2
      offset 36300-30000
      conductor  30000 0.202 ohm/sq M8
layer             700    7
layer             4000    4
layer             4000    5
layer             4000    5
      conductor 12500 0.0231 ohm/sq ALPA
layer             4000    7
layer       infinity    1.0
#layer             12500    4.2可能有误
via    M4  M5 1 ohms/via V4
via    M5 M6 1 ohms/via V5
via    M6 M7 1 ohms/via V6
via    M7 M8 1 ohms/via V7
仿真结果如图

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库里的参数如图

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