手动创建EMX衬底文件结果差好多

linxin2018

各位前辈好，我最近在研究怎么使用EMX进行电感仿真的问题，使用的是SMIC30nm工艺，手动建立的衬底文件如下，


# Comments start with '#' and continue to
# the end of the line

## Comments at the start of a line that
## begin with '##' are included in the
## output from --print-process

assume angstroms   # lengths will be in microns

# These are the GDSII layers for the conductors
define GT = L30T0
define M1 = L61T0
define M2 = L62T0
define M3 = L63T0
define M4 = L64T0
define M5 = L65T0
define M6 = L66T0
define M7 = L67T0
define M8 = L68T0
define V4 = L73T0
define V5 = L74T0
define V6 = L75T0
define V7 = L76T0
define ALPA= L83T0

# Dielectrics and conductors
#缺失过孔信息与金属层电阻率，可以去TD-MM13-SP-2001下P112寻找方块电阻率
#需要考虑是

layer             4000    4.2