6X1Z1U 是指定METAL pitch width
The backend process has so much selections .
Two kinds of inter-layer metal:
[M]x: First Inter-layer Metal, W/S=0.07μm/0.07μm.
[M]y: Second Inter-layer Metal, W/S=0.14μm/0.14μm.
Four kinds of top-layer metal:
[M]z (TM): top metal pitch is 0.8μm (W/S=0.4μm/0.4μm).
[M]y (2XTM): top metal pitch is two times of [M]x pitch (W/S=0.14μm/0.14μm).
[M]r: top metal pitch is 1.0μm (W/S=0.5μm/0.5μm)
[M]u: top metal pitch is 3.0μm (W/S=2μm/1μm)