drc问题

summerxxx

smic40工艺，请教下各位这个报错什么意思啊？怎么解决呢

                               
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Maximum M5 area of merged low density windows must follow item (1) and (2).
The definition of low density window: window size 10um*10um, step size: 5um, density <1%
(1) Maximum area of merged low density window <= 6500um2, except merged low density windows width <= 30um.
(2) Maximum area of merged low density window <= 18500um2.
DRC only check the region with width of (checking window NOT above excluding region) >= 5um
DRC doesn't check INDMY region.

yetingyu

首先定义low density window: size 10 step 5 , density < 1%
抓出这些窗口后要同时满足以下条件：
1.merge后的面积<=6500um2，或者>6500um2 且 merge 后的width<=30um
2.merge后的面积<=18500um2, 或者>18500um2 且 merge 后的width<=5um
看看你的报错属于哪种情况，对应修改