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[求助] 求助DRC error

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发表于 2015-10-9 15:32:12 | 显示全部楼层 |阅读模式

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各位大侠,我用的0.18um工艺,在做calibre DRC的时候出现了下面这么多error,请教一下该如何修改,谢谢!
有一些是因为desity不够,可以在所报区域加上一些dummy来解决;我很疑惑的是,为什么encounter布局布线,还会有Metal间距的问题(第29个)和Metal宽度的问题(第25个)?其它的错误都要解决吗?谢谢指教!

1.
Spacebetween N-Well edge and an N+ AA region which is outside an NW is >= 0.43um


2.
N-Wellenclosure of a P+ AA region which inside an NW is >= 0.43um


3.
Spacebetween GATE edge and edge of a butted diffusion AA region is >= 0.32um


GT width for interconnects is >= 0.18um


4.
Spacebetween two GT regions on field oxide area is >= 0.25um



5.
Polyextension of AA is >= 0.22um


6.
Extensionfrom AA region to GT is >= 0.32um



7.
Spacebetween field interconnect poly and AA is >= 0.10um



8.
GTdensity is >= 14%



9.
Spacebetween two GTs on AA which is with CT is >= 0.375um



10.Spacebetween SN and a non-butted edge of P+ pick-up AA region is >= 0.10um


if the distance between P+ AA and N-well >= 0.43m



11.Spacebetween a SN region and a non-butted edge of P-well pick-up P+ AA region


is >= 0.18um if the distance between P+ AA andN-well < 0.43um



12.Enclosureof a SN edge to an N-channel Poly gate along source/drain direction is >=0.32um


13.Enclosureof a SN edge to a N-channel Poly gate along the direction of poly gate is >=0.35um



14.Spacefrom a SN edge to a P-channel Poly gate along the direction of poly gate is>= 0.35um



15.Spacebetween SP and a non-butted edge of N+ pick-up AA region is >= 0.10um


if the distance between N+ AA and P-well >= 0.43m



16.Spacebetween a SP region and a non-butted edge of N-well pick-up N+ AA region


is >= 0.18um if the distance between N+ AA and P-well< 0.43um



17.Enclosureof a SP edge to P-channel Poly gate along source/drain direction is >=0.32um


Space from a SP edge to a P-channel Poly gate alongthe direction of poly gate is >= 0.35um



18.Spacefrom a SP edge to a N-channel Poly gate along the direction of poly gate is>= 0.35um



19.Spacebetween poly CT to AA is >= 0.20um



20.Spacebetween poly to diffusion CT is >= 0.16um



21.Enclosureof an AA region beyond an AA CT region is >= 0.10um


Enclosure of a poly region beyond a poly CT region is>= 0.10um



22.Vnsize is = 0.26um (exclude Metal-fuse's Protection Ring area and MARKS seal ringarea).


The size should be performed on all area whichincludes the DRC block layer



23.Spacebetween two Vns is >= 0.26um



24.Vnsize is = 0.26um (exclude Metal-fuse's Protection Ring area and MARKS seal ringarea).


The size should be performed on all area whichincludes the DRC block layer



25.M1width is >= 0.23um


26.Spacebetween two M1 regions is >= 0.23um


27.Enclosureof M1 region over CT region is >= 0.005um.


Enclosure of M1 line end region beyond CT region is>= 0.06um. For CT at 90 degree corner, one side must be considered as lineend region.



28.Spacebetween M1 lines with one or both metal line width and length are greater than10um is >= 0.60um.


The minimum space must be maintained between a metalline and a small piece of metal (< 10um) that is


connected to the wide metal within 1.00um range fromthe wide metal


29.Spacebetween two Mn-1 regions is >= 0.28um


30.Minimumspace between Mn-1 lines with one or both metal line width and length aregreater than 10um is 0.60um


The minimum space must be maintained between a metalline and a small piece of metal(<10) that is connected


to the wide metal within 1.0um range from the widemetal.



31.Mn-1density is >= 30%. Dummy pattern is required for


those with Mn-1 density less than 30%



32.Spacebetween two Mn-1 regions is >= 0.28um



33.Mn-1density is >= 30%. Dummy pattern is required for


those with Mn-1 density less than 30%


34.Minimumspace between Mn-1 lines with one or both metal line width and length aregreater than 10um is 0.60um


35.Theminimum space must be maintained between a metal line and a small piece ofmetal(<10) that is connected


to the wide metal within 1.0um range from the widemetal.


36.Mn-1density is >= 30%. Dummy pattern is required for


those with Mn-1 density less than 30%



37.MTdensity is >= 30%


Dummy pattern is required for those with MT densityless than 30%



38.(Thisis for M4/M5/M6 stack)


39.Minimumspace between a small metal island and a big metal block is 1.00um.(small metalisland: width*length < 1um*um


big metal block: width > 25um, length > 100um)



40.TheBORDER layer must enclose all chip layout patterns, which all chip layoutpatterns


include seal ring if seal ring has been added bydesigners.


This rule checking includes the layers of DNW,AA,NW,MVN, MVP,DG,GT,SN,SP,SAB,CT,M1,V1,Mn,


Vn,TMn,TVn,PA,Fuse,AADUM,GTDUM,MnDUM,TMnDUM


41.Enclosureof AA, GT, CT, Mn(n=1-5), Vn(n=1-5), TM by BORDER layer if it need SMIC to add


seal ring. (AA, GT, CT, Mn, Vn, TM are OPC treatmentlayers) is >= 1.1um.


42.PMOSin PW is not allowed



发表于 2015-10-9 17:30:36 | 显示全部楼层
没加filler吧,感觉,你列的error太多了,没人会帮你看的

首先edi里面要verifygeometry,verifyconnectivity过,
 楼主| 发表于 2015-10-9 18:56:38 | 显示全部楼层
回复 2# icfbicfb


    verifygeometry,verifyconnectivity确实有问题,有Antenna(Dangling Wire),open, spacing,short的问题,为什么会有这些问题呢?如下图所示,该如何着手解决Antenna(Dangling Wire),spacing的问题呢?谢谢!
check.jpg
发表于 2015-10-10 11:14:40 | 显示全部楼层
这个要有人在旁边和你说才行,  讲不清,
 楼主| 发表于 2015-10-12 10:20:59 | 显示全部楼层
回复 4# icfbicfb

请问这个需要手动修改还是可以在encounter里面选择一些选项就可以解决?以前流片从来不会遇到这种情况,一般encounter的时候就没有Connectivity和Geometry的问题。谢谢!
发表于 2022-8-2 20:21:26 | 显示全部楼层
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