on-chip capacitor can be impelemented with mos-cap/MiM-cap/Fringe-cap etc.
500nF is unacceptable
Less than several pF is prefered. for insance in A/D the smapling/hold capacitor is usually less than 1pF (enough for 10bit ADC)
in crystal oscillator or PLL, less than 20~30pF (size larger than several hundred um^2)