谁能帮我搜到这篇论文

sunbinsunbird

Title: Theoretical Study on the Formation Process of Empty Space in SiliconAuthor: K. Mitsutake and Y. Ushiku
Published at: Extended abstracts of the 2000 international conference on solid state devices and materials 2000， page198

参看：https://getinfo.de/app/Theoretical-Study-on-the-Formation-Process-of-Empty/id/BLCP%3ACN036978739

预先谢谢了！