Mixed signal calibre drc规则检查 最高层金属问题

flyingsheep

最近做一个ICC设计（纯数字电路），布线（六层金属）完成后用calibre做drc 发现第六层一堆问题 查看了calibre.drc（mixed signal的，FOR TSMC 0.18UM CMOS LOGIC/MS/RF AND 0.16UM CMOS LOGIC/MS 1P6M PROCESS DESIGN RULE） 有以下内容

第一套mental6规则 和icc tf相同：
// M6 checks
//=============
M6.W.1 { @ Min. M6 width < 0.44
  INT M6 < 0.44 ABUT < 90 SINGULAR REGION
}
M6.S.1 { @ Min. M6 space < 0.46
  EXT M6 < 0.46 ABUT < 90 SINGULAR REGION
}
M6.S.2 { @ Min. space to wide M6 (>10um) < 0.6
  M6_S5 = SHRINK (SHRINK (SHRINK (SHRINK M6 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M6_G5 = GROW (GROW (GROW (GROW M6_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M6_Wide = M6_G5 AND M6
  M6_Exp = SIZE M6_Wide BY 1 INSIDE OF M6 STEP 0.322
  M6_Branch = M6_Exp NOT M6_Wide
  M6_Branch_edge = M6_Branch COIN INSIDE EDGE M6
  M6_Check = M6 AND (SIZE M6_Exp BY 0.6)
  M6_Branch_Check = M6 AND (EXPAND EDGE M6_Branch_edge OUTSIDE BY 0.6 CORNER FILL)
  M6_WideC = STAMP M6_Wide BY M6xd
  M6_CheckC = STAMP M6_Check BY M6xd
  M6_BranchC = STAMP M6_Branch BY M6xd
  M6_Branch_CheckC = STAMP M6_Branch_Check BY M6xd
  EXT M6_WideC M6_CheckC < 0.6 ABUT >0 <89.5 NOT CONNECTED REGION
  EXT M6_BranchC M6_Branch_CheckC < 0.6 ABUT >0 <89.5 NOT CONNECTED REGION
}
M6.E.1 { @ Min. extension of a M6 region beyond a VIA5 region < 0.09
   ENC VIA5 M6 < 0.09 ABUT<90 SINGULAR
   VIA5 NOT M6   
}
M6.A.1 { @ Min. M6 area region < 0.562
  AREA M6 < 0.562
}



第二套mental6规则  DRC报告的问题所在
#IFDEF MIX_MODE

//===============================================================================
// Mixed-Singal/RF part
//===============================================================================

// M6 checks
//=============

#IFDEF THICK_20K

.W.1 { @ Min. M6 width >= 1.50 um
  INT M6 < 1.50 ABUT < 90 SINGULAR REGION
}
UTM20K.S.1 { @ Min. M6 spacing >= 1.50 um
  EXT M6 < 1.50 ABUT < 90 SINGULAR REGION
}
UTM20K.E.1 { @ Min. extension of a M6 region beyond a VIA5 region >= 0.3 um
  ENC VIA5 M6 < 0.3 ABUT < 90 SINGULAR REGION
  VIA5 NOT M6   
}
UTM20K.E.2 { @ Min. extension of M6 end-of-line region beyond VIA5 region >= 0.45 um
  X = ENC [VIA5] M6 < 0.45 ABUT < 90 OPPOSITE
// a narrow side
  INT X < 0.36 ABUT == 90 INTERSECTING ONLY
// adjacent narrow sides
}
UTM20K.S.2 { @ Min. space of Wide M6 (>16um) and M6 >= 3.0 um (exclude application for inductor)
  M6T_NIND_S8 = SHRINK (SHRINK (SHRINK (SHRINK M6T_NIND RIGHT BY 8) LEFT BY 8) TOP BY 8) BOTTOM BY 8
  M6T_NIND_G8 = GROW (GROW (GROW (GROW M6T_NIND_S8 RIGHT BY 8) LEFT BY 8) TOP BY 8) BOTTOM BY 8
  M6T_NIND_Wide = M6T_NIND_G8 AND M6T_NIND
  M6T_NIND_Exp = SIZE M6T_NIND_Wide BY 1 INSIDE OF M6T_NIND STEP 1.05
  M6T_NIND_Branch = M6T_NIND_Exp NOT M6T_NIND_Wide
  M6T_NIND_Branch_edge = M6T_NIND_Branch COIN INSIDE EDGE M6T_NIND
  M6T_NIND_Check = M6T_NIND AND (SIZE M6T_NIND_Exp BY 3.0)
  M6T_NIND_Branch_Check = M6T_NIND AND (EXPAND EDGE M6T_NIND_Branch_edge OUTSIDE BY 3.0 CORNER FILL)
  M6T_NIND_WideC = STAMP M6T_NIND_Wide BY M6xd
  M6T_NIND_CheckC = STAMP M6T_NIND_Check BY M6xd
  M6T_NIND_BranchC = STAMP M6T_NIND_Branch BY M6xd
  M6T_NIND_Branch_CheckC = STAMP M6T_NIND_Branch_Check BY M6xd
  EXT M6T_NIND_WideC M6T_NIND_CheckC < 3.0 ABUT >0 <89.5 NOT CONNECTED REGION
  EXT M6T_NIND_BranchC M6T_NIND_Branch_CheckC < 3.0 ABUT >0 <89.5 NOT CONNECTED REGION
}
UTM20K.A.1 { @ Min. area of M6 region >= 2.25 um2
  AREA M6 < 2.25
}
UTM20K.R.1 { @ Min. density of M6 area >= 30% (exclude application for inductor)
  CHIP_NIND = CHIP NOT INDDMY
  DENSITY M6T_NIND CHIP_NIND < 0.3 PRINT M6T_DENSITY.log
  [ AREA(M6T_NIND)/AREA(CHIP_NIND) ]
}


对比两个metal6的检查规则可以发现第一套规则跟icc 的规则相同，布线完成后都是这种规则，但是实际检查mental6是按第二套规则来的，导致很多UTM20K违例 基本上第二套规则都没有满足

这个calibre规则是mix signal的 第二套规则也有一个#IFDEF MIX_MODE   想问一下这样的drc违例纯数字电路要管吗？
能不能在布线的时候按照第二套规则设置icc的布线呢，我只知道时钟布线的时候可以define_routing_rule，不知道route阶段能不能也设置一下，如果可以，像minarea这样的规则又怎么设置呢？
希望大神指点迷津啊！！！

oceanlee

我也出现了同样的问题，请问有没有人知道呢？

oceanlee

UTM20K.E.1{@min.extension of a M6 region beyond a VIA5 region >= 0.3um
  ENC VIA5 M6<0.3 ABUT < 90 SINGULAR REGION
VIA5 NOT M6}

damonzhao

你的drc rule的option设置是啥
第二种应该是厚金属的检查规则，你的icc的没用20Ka的金属绕线

oceanlee

回复 4# damonzhao


    那么请问版主，这个问题到底怎么解决呢？？我对比了一下tf文件和DRC规则，两个关于M6和VIA5的规则是一样。那么这是哪里的问题呢？

damonzhao

回复 5# oceanlee


  你的设计是用的普通metal还是20KA的metal？
要是前者，那你DRC里应该有option可以设置控制的。
要是后者，那你ICC的tf文件需要改为20KA的进行。

oceanlee

回复 6# damonzhao


    版主，我用的是EDI在做P&R。这个怎么改呀？

oceanlee

回复 6# damonzhao


    在设计过程中，按照项目需求。需要20KA的金属

damonzhao

回复 7# oceanlee

那就换对应的lef呗

oceanlee

回复 9# damonzhao

我试试。谢谢版主！