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本帖最后由 wangjade 于 2012-3-23 10:12 编辑
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 Abstract—In this survey paper, we describe and contrast three
 different approaches for extending circuit simulation to include micromachined
 devices. The most commonly used method, that of
 using physical insight to develop parameterized macromodels, is
 presented first. The issues associated with fitting the parameters to
 simulation data while incorporating design attribute dependencies
 are considered. The numerical model order reduction approach to
 macromodeling is presented second, and some of the issues associated
 with fast solvers and model reduction are summarized. Lastly,
 we describe the recently developed circuit-based approach for simulating
 micromachined devices, and describe the design hierarchy
 and the use of a catalog of parts.
 
 
  Emerging Simulation Approaches for Micromachined Devices.pdf
            
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