Emerging Simulation Approaches for Micromachined Devices

wangjade · 发表于 2012-3-22 22:12:35

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本帖最后由 wangjade 于 2012-3-23 10:12 编辑

Abstract—In this survey paper, we describe and contrast three
different approaches for extending circuit simulation to include micromachined
devices. The most commonly used method, that of
using physical insight to develop parameterized macromodels, is
presented first. The issues associated with fitting the parameters to
simulation data while incorporating design attribute dependencies
are considered. The numerical model order reduction approach to
macromodeling is presented second, and some of the issues associated
with fast solvers and model reduction are summarized. Lastly,
we describe the recently developed circuit-based approach for simulating
micromachined devices, and describe the design hierarchy
and the use of a catalog of parts.

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