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共享一些多年收集的一些MEMS领域的重要综述，初学MEMS的看看，还是很有帮助的！以后还会不断总结发布，为共同繁荣MEMS板块努力！一共27篇，下面为附件综述题目列表：
Bulk and surface micromachined MEMS in thin film SOI technology
Bulk micromachining of silicon
Celebration of the tenth transducers conference The past, present and future of transducer research and development
CMOS MEMS
CMOS MEMS - present and future
CMOS-based microsensors and packaging
Etch Rates for Micromachining Processing-1
Etch Rates for Micromachining Processing-2
IC microsensors-between system and technology
In the flow with MEMS
Integrated sensors, MEMS, and microsystems Reflections on a fantastic voyage
Integrated silicon sensors technology and microstructures
MATERIALS ISSUES IN MICROELECTROMECHANICAL system
MEMS-based gas flow sensors
Microelectromechanical systems(MEMS)- Fabrication,design and applications
Micromachined flow sensors--a review
Micromachined thermally based CMOS microsensors
Microsensor Integration Into SOC
On integrated CMOS-MEMS system-on-chip
Packaging of microfabricated devices and systems
Physical Principles of Thermal Sensors
Progress in CMOS integrated measurement systems
review of temperature measurement
simlution mems
Surface micromachining for microelectromechanical systems
Thermal flow micro sensors
Vacuum-sealed silicon micromachined pressure sensors |
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发表于 2012-1-15 15:38:21
