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Table of Contents
I. Chapter Overview
1. Semiconductor industry overview
2. Semiconductor materials
3. Device technologies—IC families
4. Silicon and wafer preparation
5. Chemicals in the industry
6. Contamination control
7. Process metrology
8. Process gas controls
9. IC fabrication overview
10. Oxidation
11. Deposition
12. Metallization
13. Photoresist
14. Exposure
15. Develop
16. Etch
17. Ion implant
18. Polish
19. Test
20. Assembly and packagingSemiconductor Manufacturing Gu ... |
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