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本帖最后由 QrzQrz 于 2011-5-4 01:14 编辑
WAT test & Electrical Test Structures
Outlines
•1.Learn about the basic transistor parameters.
•2. Learn about the requirement for binning spec.
•3. Understand the design consideration of Eteststructures.
•-Continuity and Bridging
•-Diode structures
•-Resistor structures
•-Transistor structures
Learning objective
•Objective : By the end of this training, we will learn about the following points.
•Learn the design consideration of Electrical test structures.
•Correlate theetestmeasurementto some of the basic process parameters.(binningparameters)
•Familiar with layout drawing and the cross section of test structures. |
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