RF.MEMS.And.Their.Applications，一本有关RF和MEMS的英文书，电子版

ysuzxp

John.Wiley.And.Sons   RF.MEMS.And.Their.Applications




有关RF和MEMS的应用

目录：

1 Microelectromechanical systems (MEMS) and radio frequency
MEMS 1

1.1 Introduction 1
1.2 MEMS 2
1.3 Microfabrications for MEMS 5
1.4 Electromechanical transducers 16
1.5 Microsensing for MEMS 35
1.6 Materials for MEMS 42
1.7 Scope of this book 44

2 MEMS materials and fabrication techniques 51
2.1 Metals 51
2.2 Semiconductors 54
2.3 Thin films for MEMS and their deposition techniques 61
2.4 Materials for polymer MEMS 67
2.5 Bulk micromachining for silicon-based MEMS 84
2.6 Silicon surface micromachining 91
2.7 Microstereolithography for polymer MEMS 94
2.8 Conclusions 105
References 105

3 RF MEMS switches and micro relays 109
3.1 Introduction 109
3.2 Switch parameters 111
3.3 Basics of switching 115
3.4 Switches for RF and microwave applications 117
3.5 Actuation mechanisms for MEMS devices 127
3.6 Bistable micro relays and microactuators 152
3.7 Dynamics of the switch operation 157
3.7.1 Switching time and dynamic response 158
3.7.2 Threshold voltage 160
3.8 MEMS switch design, modeling and evaluation 162
3.8.1 Electromechanical finite element analysis 163
3.8.2 RF design 165
3.9 MEMS switch design considerations 174
3.10 Conclusions 175

4 MEMS inductors and capacitors 183
4.1 Introduction 183
4.2 MEMS/micromachined passive elements: pros and cons 184
4.3 MEMS inductors 184
4.4 MEMS capacitors 215
4.4.1 MEMS gap-tuning capacitors 217
4.4.2 MEMS area-tuning capacitors 224
4.4.3 Dielectric tunable capacitors 228
4.5 Conclusions 229

5 Micromachined RF filters 241
5.1 Introduction 241
5.2 Modeling of mechanical filters 244
5.3 Micromechanical filters 258
5.4 Surface acoustic wave filters 268
5.5 Bulk acoustic wave filters 276
5.6 Micromachined filters for millimeter wave frequencies 278
5.7 Summary 282

6 Micromachined phase shifters 285
6.1 Introduction 285
6.2 Types of phase shifters and their limitations 286
6.3 MEMS phase shifters 289
6.4 Ferroelectric phase shifters 298
6.5 Applications 305
6.6 Conclusions 305

7 Micromachined transmission lines and components 309
7.1 Introduction 309
7.2 Micromachined transmission lines 310
7.3 Design, fabrication and measurement 334

8 Micromachined antennae 343
8.1 Introduction 343
8.2 Overview of microstrip antennae 344
8.3 Micromachining techniques to improve antenna performance 351
8.4 Micromachining as a fabrication process for small antennae 356
8.5 Micromachined reconfigurable antennae 360
8.6 Summary 362

9 Integration and packaging for RF MEMS devices 365
9.1 Introduction 365
9.2 Role of MEMS packages 366
9.3 Types of MEMS packages 367
9.4 Flip-chip assembly 373
9.5 Multichip module packaging 375
9.6 RF MEMS packaging: reliability issues 380
9.7 Thermal issues 383
9.8 Conclusions 383
References 384

ysuzxp

不好意思，正好5M多一点，只好拆成两个文件发了

ysuzxp

自己再顶一下

ysuzxp

怎么没人回复一下啊，
自己顶一下

ysuzxp

怎么没人回复一下啊，
自己顶一下

xujia_sunny

不错的东西，谢谢。

apteye

xiexie

chhwang0123

very good material

ysuzxp

ysuzxp