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[size=120%]Wafer Level 3-D ICs Process Technology (Integrated Circuits and Systems)
By Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif
- Publisher: Springer
- Number Of Pages: 410
- Publication Date: 2008-09-19
- ISBN-10 / ASIN: 0387765328
- ISBN-13 / EAN: 9780387765327
Product Description:
This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging.
This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry. |
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