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发一本半导体工艺的书。
出版：John Wiley & Sons
编著：Gary S. May, Ph.D.
Georgia Institute of Technology
Atlanta, Georgia
Costas J. Spanos, Ph.D.
University of California at Berkeley
Berkeley, California
In simple terms, manufacturing can be defined as the process by which raw
materials are converted into finished products. The purpose of this book is to
examine in detail the methodology by which electronic materials and supplies
are converted into finished integrated circuits and electronic products in a highvolume
manufacturing environment. This subject of this book will be issues
relevant to the industrial-level manufacture of microelectronic device and circuits,
including (but not limited to) fabrication sequences, process control, experimental
design, process modeling, yield modeling, and CIM/CAM systems. The book will
include theoretical and practical descriptions of basic manufacturing concepts, as
well as some case studies, sample problems, and suggested exercises.
The book is intended for graduate students and can be used conveniently in a
semester-length course on semiconductor manufacturing. Such a course may or
may not be accompanied by a corequisite laboratory. The text can also serve as
a reference for practicing engineers and scientists in the semiconductor industry. |
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发表于 2009-1-14 08:20:30
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