silvaco tcad license出错，怎么办

lzd

我也是来找答案的

liou10dong20

不懂啊，学习学习。

liou10dong20

多谢大家分享了

你的微笑

go atlas
Title GaAs MESFET Simulation with EB and DD models
#
#  第一部分:网格定义
mesh  space.mult=2.0
#
x.mesh loc=0.00 spac=0.02
x.mesh loc=0.2 spac=0.01
x.mesh loc=0.4 spac=0.01
x.mesh loc=0.6 spac=0.02
#
y.mesh loc=0.00 spac=0.005
y.mesh loc=0.2 spac=0.02
y.mesh loc=1 spac=0.1
#
#  第二部分:结构和模型定义
region num=1 material=GaAs
#
elec num=1 name=source x.min=0.0 y.min=0.0 x.max=0.1 y.max=0.
elec num=2 name=drain x.min=0.5 y.min=0.0 x.max=0.6 y.max=0.
elec num=3 name=gate x.min=0.2 length=0.2
#
dopinguniform conc=1.e15 p.type        #  衬底
dopinguniform conc=1.e17 n.type y.min=0 y.max=0.12  #  沟道
dopinguniform conc=5.e18 n.type x.left=0.0  x.right=0.1 y.min=0 y.max=0.05
dopinguniform conc=5.e18  n.type x.left=0.5  x.right=0.6 y.min=0 y.max=0.05 #S/D
#
contact num=3 work=4.87
#
######################################
#      EB calculation    #
######################################
#
models print conmob fldmob evsatmod=1 hcte.el
material taurel.el=1.e-12 taumob.el=1.e-12 vsat=1.e7  #  弛豫时间、饱和速度
#
#  第三部分:解初始解
solve init
save outf=mesfetex03.str
tonyplot mesfetex03.str -set mesfetex03_0.set
#
#  第四部分:求解输出曲线


method newton maxtrap=6
output e.velocity
#
probe n.mob max dir=0 name="mux"
probe n.mob max dir=90 name="muy"
log outf=mesfetex03_1.log
#
solve vdrain=0.0 vstep=0.05 vfinal=0.5 name=drain
method newton
solve vdrain=0.6 vstep=0.1 vfinal=2 name=drain  # Vd
save outf=mesfetex03_1.str
#
####################################
#  DD calculation    #
####################################
#
go atlas
#  第一部分:重载网格、结构定义
mesh infile=mesfetex03.str
#
contact num=3 work=4.87
models print conmob fldmob evsatmod=1
material  taurel.el=1.e-12  taumob.el=1.e-12
vsat=1.e7
#
#  第二部分:输出曲线
method newton maxtrap=6
output e.velocity
probe n.mob max dir=0 name="mux"
probe n.mob max dir=90 name="muy"
log outf=mesfetex03_2.log
solve vdrain=0.0 vstep=0.05 vfinal=0.5 name=drain     
method newton
solve vdrain=0.6 vstep=0.1 vfinal=2 name=drain
save outf=mesfetex03_2.str
tonyplot mesfetex03_1.log -overlay mesfetex03_2.log -set mesfetex03_log.set
quit

你的微笑

在你的silvaco安装目录下新建一个名为work的文件夹以存放临时文件.  应该就能用了
不知道你的安装程序和我的一样不, 仅供参考

你的微笑

trap acceptor e.level=0.45 density=1.0e16 degen=12 sign=1e-14 sigp=3.e-14 fast

你的微笑

go athena
#  网格定义
line x loc=0.00 spac=0.10
line x loc=2 spac=0.10
#
line y loc=0.1 spac=0.01
line y loc=0.5 spac=0.1
#  衬底定义
init gaas c.silicon=1.0e11
#  外延层沉积
# an active layer of0.1um of n-type GaAs isdeposited
deposit gaas thick=0.10 c.silicon=2.0e17 divisions=15 dy=0.005 ydy=0.00
#  形成掩蔽层
deposit nitride thick=0.5 divisions=4
etch nitride left    p1.x=0.2
etch nitride right p1.x=1.8
relax y.min=0.2
#  形成源/漏
implant silicon dose=1.0e15 energy=30
etch nitride all
#  形成接触
deposit alum thickness=0.01 div=1
etch alum start x=0.2 y=-5
etch cont x=0.7 y=-5
etch cont x=0.7 y=5
etch done x=0.2 y=5
etch alum start x=1.3 y=-5
etch cont x=1.8 y=-5
etch cont x=1.8 y=5
etch done x=1.3 y=5
#  电极定义
electrode name=source x=0.1
electrode name=gate x=1.0
electrode name=drain x=1.9
#  结构保存&绘画
structure outf=mesfetex05_0.str   
tonyplot mesfetex05_0.str -set mesfetex05_0.set







go atlas
#  定义接触&模型
contact name=gate work=4.87
models print fldmob srh
#饱和速度、电子空穴 SRH 复合寿命
material vsat=0.92e7 taun0=1e-9 taup0=1e-9
#TRAP 语句用来设置体陷阱态的参数.
trap acceptor e.level=0.45 density=1.0e16 degen=12 sign=1e-14 sigp=3.e-14 fast  #  受主陷阱
#
method newton trap
solve prev
solve vdrain=0.01
solve vdrain=0.05
solve vdrain=0.2
solve vdrain=0.5
#
log outf=mesfetex05_1tr.log master
solve vgate=-2.0 ramptime=1e-9 dt=1e-11 tstop=1000e-9
save outf=mesfetex05_2tr.str
tonyplot    mesfetex05_2tr.str -set mesfetex05_1.set

go atlas
contact name=gate work=4.87
models print fldmob srh
#
material vsat=0.92e7 taun0=1e-9 taup0=1e-9
#
method    newton trap
solve prev
solve vdrain=0.01
solve vdrain=0.05
solve vdrain=0.2
solve vdrain=0.5
#
log outf=mesfetex04_1.log
solve  vgate=-2.0 ramptime=1e-9 dt=1e-11 tstop=1000e-9                    
save outf=mesfetex05_2.str
tonyplot    mesfetex05_1.log -overlay mesfetex05_1tr.log  
quit

relient

找答案。。。。。。。。。。。