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发表于 2008-8-12 21:00:48
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5、EE243 :Advanced IC Processing and Layout Description: The key processes for the fabrication of integrated circuits. Optical, X-ray, and e-beam lithography, ion implantation, oxidation and diffusion. Thin film deposition. Wet and dry etching and ion milling. Effect of phase and defect equilibria on process control. |
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