对于一个.35um的BCD工艺中有一些疑惑

Sajid

Usually in BCD process, HDD is the highly doped drain which helps to have a better electrical connection between metal contract and semiconductor, so that no wanted Schottky junction forms. NHDD is basically a extended drain region with higher annealing time/temperature, usually with high ion implantation energy one can dope the N-type purity in bulk and than use annealing to get a higher doped area below the drift region.