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[size=120%]Silicide Technology for Integrated Circuits (Processing)
By Lih J. Chen
- Publisher: The Institution of Engineering and Technology
- Number Of Pages: 304
- Publication Date: 2004-12-17
- ISBN-10 / ASIN: 0863413528
- ISBN-13 / EAN: 9780863413520
DescriptionScope:This is the first book to provide guidance on the development andapplication of metal silicide technology as it emerges from thescientific to the prototype and manufacturing stages. Other key topicscovered are fundamentals, present and future silicide technology forSi-based devices, and characterisation methods.
About the Editor: Professor Chen is Dean at National Tsing Hua University, Taiwan. |
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