可以看看Layer Resolution的用法,看起来可以更改某一层次的格点要求。
如下是SVRF中提供的例子:
Examples
PRECISION 1000
RESOLUTION 100 // align on a .10 um grid
LAYER RESOLUTION poly1 poly2 50 // align poly1 and poly2 on a .05 um grid
FLAG OFFGRID YES // all geometry must be on .10 um grid
// except poly must be on .05 um grid