先进工艺下的temperature sensor应该怎么做？

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Compact and fast temperature sensors arenecessary for thermal management of modern systems-on-chip (SoCs), in whichnumerous sensors are implemented on the same die to monitor temperaturegradients [1]. Temperature sensing is often performed by comparing signals(voltages or currents) that are proportional to absolute temperature with signalsthat are complementary to absolute temperature (CTAT). The output is thenobtained by comparing the frequency of two oscillators operating with differentcurrent bias [2], supply voltages [3], or transistor thresholds [4]. However,many modern processes do not offer thin-oxide devices with CTATcharacteristics, requiring the use of large, high-voltage, thick-oxide devicesfor temperature measurements.