TSMC sealring GDS模板有DRC错误是否正常？

326098324 · 发表于 2021-8-17 21:36:00

本帖最后由 326098324 于 2021-8-17 21:37 编辑

请问这TSMC sealring GDS模板有DRC错误是否正常？需要修改吗？

syxd2012 · 发表于 2021-8-17 21:56:02

AP.W.4，AP.W.5，最好解决了，其他是因为没有加sealring的原因，一般可以wave

326098324 · 发表于 2021-8-17 22:02:56

CSR.EN.6.1:M1i { @ An empty isosceles triangle area must exist butted to the WLCSP sealring outside corner.
TM_SR_CORNER_A AND M1i
TM_SR_CORNER_B NOT INTERACT M1i
}

SR.S.1:AP {@ Width of Assembly isolation >= 10 um, Only M1~Mtop and CDU allowed in assembly isolation region
   @ 2. Connect circuit to sealring through AP, it is only allowed connecting to the most inner sealring (AP overlap with CB2 is not allowed)
  (APi NOT INTERACT SEALRING) AND ISOR
  (APi AND SRCSR) AND CB2i
}

AP.W.4 { @ Width of (AP interact Assembly isolation)(DRC tolerance at 45-degree turning: 0.02 um) >= 8 um
  A0 = APi INTERACT ASS_WLCSP
  A_non45 = ANGLE A0 != 45
  INT A_non45  < AP_W_4 ABUT < 90 OPPOSITE REGION
  A_45 = ANGLE A0 == 45
  INT A_45  < AP_W_4-WLCSP_TOL ABUT < 90 OPPOSITE REGION
  ASS_WLCSP NOT INTERACT APi
}

PM.WARN.1 { @ seal-ring NOT INTERACT PM1/PM2 is not allowed for WLCSP process
SR_WLCSP NOT INTERACT PM1i
SR_WLCSP NOT INTERACT PM2i
}

AP.EN.3:CB { @ AP enclosure of CB/CBD/RV  in seal-ring (DRC tolerance at 45-degree turning: 0.02 um) == 1 um
  A0 = APi AND SR_WLCSP
  B0 = CBi AND SR_WLCSP
  INTERNAL_CORNER_WAIVE_pre = (EXT B0  < AP_EN_3_W ABUT == 45 REGION) INSIDE ((HOLES CBi INNER) INTERACT CSRDMY)
  INTERNAL_CORNER_WAIVE = SIZE INTERNAL_CORNER_WAIVE_pre BY GRID             // waive 45 corner
  AP_CORNER_WAIVE_pre = EXT B0 < 0.5*AP_EN_3 ABUT > 134.9 < 135.1 NOTCH REGION
  AP_CORNER_WAIVE = SIZE AP_CORNER_WAIVE_pre BY GRID                         // waive 145 notch area
  WAIVE_MERGE = INTERNAL_CORNER_WAIVE OR AP_CORNER_WAIVE                      // waive 45 corner area and 145 notch area
  PAD_IN_SR_CHK = B0 NOT TOUCH EDGE A0 //
  (ANGLE (ENC (PAD_IN_SR_CHK) APi == AP_EN_3 ) != 45) NOT INSIDE EDGE WAIVE_MERGE // otho direction fixed value check
  ENC [PAD_IN_SR_CHK] APi < AP_EN_3-WLCSP_TOL ABUT < 90 OPPOSITE PARALLEL             // 45 degree direction  -WLCSP_TOL
  (ENC [PAD_IN_SR_CHK] APi > AP_EN_3+WLCSP_TOL < AP_EN_3+42 ABUT < 90 OPPOSITE PARALLEL) NOT INSIDE EDGE WAIVE_MERGE // 45 degree direction  +WLCSP_TOL
}