MEMS：Field Models and Optimal Design

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by Paolo Di Barba, Slawomir Wiak
1st Edition
Springer International Publishing, 2020
This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage.