【Ebook 2014】Sputtering Materials for VLSI and Thin Film Devices

hsh22 · 发表于 2018-10-23 20:32:43

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Sputtering Materials for VLSI and Thin Film Devices

Sputtering Materials for VLSI and Thin Film Devices.part1.rar (15 MB , 下载次数: 93 )

Sputtering Materials for VLSI and Thin Film Devices.part2.rar (15 MB , 下载次数: 96 )

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Sputtering Materials for VLSI and Thin Film Devices.part4.rar (7.11 MB , 下载次数: 64 )

Sputtering is one of the processes for depositing thin films on suitable substrates. The fundamentals of sputtering methods are well understood and related topics have been reviewed extensively in journal articles and book chapters. The source material for sputter deposition of thin films is called the sputtering target, which can be made using conventional metallurgical processes or using special processing techniques depending on the requirements of a particular application. Sputtering Materials for VLSI and Thin Film Devices is aimed at correlating the physics of sputtering, the characteristics of sputtering target, chamber design and thin film properties in an integrated manner to understand technologically-important manufacturing processes

lhyi · 发表于 2018-10-24 01:45:52

Thanks

im.leo · 发表于 2018-10-24 08:34:18

多谢分享

alter_chen · 发表于 2018-10-24 10:13:29

谢谢分享

dcircuit · 发表于 2018-10-24 19:29:08

thanks

xuleiwx · 发表于 2018-10-29 09:13:56

下载看看

smrecnik · 发表于 2018-10-29 10:42:12

thanks for sharing

ysliu168 · 发表于 2019-3-13 13:40:23

thanks

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