sentaurus 仿真求助

czd · 发表于 2015-9-23 20:50:25

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最近在用sentaurus  仿真bjt 热特性，总是提示 n1_msh,tdr is not a mixed-element geometry????
这是什么呢问题呢？真心求助。。。。。。  仿真代码如下：
;DEVICE BJT
;----------------------------------------------------------------------
; Setting parameters
; - lateral
(define Lem       3.0) ; [um]
(define Ltotal    10.0) ; [um]
; - layers
(define Hbase  0.8);
(define Hepi 1.2);
(define Hn+ 200.0);
;----------------------------------------------------------------------
; Derived quantities
(define Xe       (* Ltotal 0.2))
(define Xem       Lem)
(define Xmax    Ltotal)
(define Ybase    Hbase)
(define Xbase    (* Ltotal 0.8))
(define Yn_epi 6.0  )
(define Yepi    (+ Ybase Hepi))
(define Ymax    (+ Yepi Hn+))
;*************************************************************************
; Overlap resolution: New replaces Old
(sdegeo:set-default-boolean "ABA")
;****************************************************************************
; Creating epi
(sdegeo:create-rectangle
  (position 0.0 0.0  0.0 )
  (position Xmax    Yn_epi 0.0 )
  "Silicon" "region_1"
)
; Creating default region
(sdegeo:create-rectangle
  (position 0.0    0.0  0.0 )
  (position Xmax Ymax 0.0 )
  "Silicon" "region_2"
)
;---------------------------------------------------------------------
;----------------------------------------------------------------------
; Contact declarations
(sdegeo:define-contact-set "emitter"
  4.0  (color:rgb 0.0 0.0 1.0 ) "##")

(sdegeo:define-contact-set "base"
  4.0  (color:rgb 1.0 1.0 0.0 ) "##")

(sdegeo:define-contact-set "collector"
  4.0  (color:rgb 0.0 1.0 0.0 ) "##")
(sdegeo:insert-vertex (position Xbase 0.0 0.0))
(sdegeo:insert-vertex (position Xe    0.0 0.0))
;----------------------------------------------------------------------
; Contact settings
(sdegeo:define-2d-contact
(find-edge-id (position (* Xe  0.5)  0.0  0.0))
"emitter" )

(sdegeo:define-2d-contact
(find-edge-id (position (* (+ Xmax Xbase) 0.5) 0.0 0.0))
"base")

(sdegeo:define-2d-contact
(find-edge-id (position (* Xmax  0.5) Ymax  0.0))
"collector")
; Separating lumps
(sde:assign-material-and-region-names "all")
;***********************************************************************
; Setting region names
(sde:add-material
  (find-body-id (position  (* Xmax  0.5) (* 0.5  Yn_epi)  0.0))
  "Silicon" "R.epi")
; Setting region names
(sde:add-material
  (find-body-id (position  (* Xmax  0.5) (* 0.5  Ymax)  0.0))
  "Silicon" "R.Default region")
;----------------------------------------------------------------------
;----------------------------------------------------------------------
; Profiles:
; - EPI
(sdedr:define-constant-profile "Const.Default region"
"PhosphorusActiveConcentration" 5e15 )
(sdedr:define-constant-profile-region  "PlaceCD.Default region"
"Const.Default region" "R.Default region" )
;  base line definitions
(sdedr:define-refinement-window "BaseLine.emitter" "Line"
(position 0.0  0.0 0.0)
(position Xem  0.0 0.0) )
(sdedr:define-refinement-window "BaseLine.base" "Line"
(position 0.0    0.0 0.0)
(position Xmax 0.0 0.0) )
(sdedr:define-refinement-window "BaseLine.collector" "Line"
(position Xmax    Ymax  0.0)
(position 0.0    Ymax  0.0) )
;  implant definition
(sdedr:define-gaussian-profile "Impl.P_base_prof"
"BoronActiveConcentration"
"PeakPos" 0.0  "PeakVal" 5e18
"ValueAtDepth" 5e15  "Depth" Ybase
"Gauss"  "Factor" 0.0
)
;  implant definition
(sdedr:define-gaussian-profile "Impl.N+emitter_prof"
"ArsenicActiveConcentration"
"PeakPos" 0.0  "PeakVal" 5e20
"StdDev"  0.0875
"Gauss"  "Factor" 0.8
)
;  implant definition
(sdedr:define-erf-profile "Impl.N+collector_prof"
"PhosphorusActiveConcentration"
"SymPos" 198  "MaxVal" 5e19
"ValueAtDepth" 5e15  "Depth" 200.0
"Erf"  "Factor" 0.0
)
;implants
(sdedr:define-analytical-profile-placement "Impl.N+emitter"
"Impl.N+emitter_prof" "BaseLine.emitter" "Positive" "NoReplace" "Eval")
(sdedr:define-analytical-profile-placement "Impl.P_base"
"Impl.P_base_prof" "BaseLine.base" "Positive" "NoReplace" "Eval")
(sdedr:define-analytical-profile-placement "Impl.N+collector"
"Impl.N+collector_prof" "BaseLine.collector" "Positive" "NoReplace" "Eval")
;----------------------------------------------------------------------
; Meshing Strategy:
; EPI
(sdedr:define-refinement-size "Ref.SiEpi"
  0.2 0.1
  0.002 0.002)
(sdedr:define-refinement-region "RefPlace.SiEpi"
"Ref.SiEpi" "R.epi" )
; Default region
(sdedr:define-refinement-size "Ref.Default region"
  1.0 2.0
  0.002 0.002)
(sdedr:define-refinement-function
"Ref.Default region"
"DopingConcentration"
"MaxTransDiff" 1
)
(sdedr:define-refinement-region "RefPlace.Default region"
"Ref.Default region" "R.Default region")
;--------------------------------------------------------------------------------
; Yepi Multibox
(sdedr:define-refinement-window "MBWindow.Yepi"
"Rectangle"
(position 0.0 (- Yepi 0.2) 0.0  )
(position Xmax (+ Yepi 0.5) 0.0  ))
(sdedr:define-multibox-size "MBSize.Yepi"
  0.1 0.08
  0.05  0.02
  1.0 1.35 )
(sdedr:define-refinement-function "MBSize.Yepi"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Yepi"
"MBSize.Yepi" "MBWindow.Yepi" )
;---------------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.Nepi"
"Rectangle"
(position    0.0       (+ Ybase 0.2) 0.0 )
(position    Xmax       (- Yepi  0.2) 0.0  ) )
(sdedr:define-multibox-size "MBSize.Nepi"
  0.1 0.1
  0.02  0.05
  1.0 1.35)
(sdedr:define-refinement-function "MBSize.Nepi"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Nepi"
"MBSize.Nepi" "MBWindow.Nepi" )
;------------------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.Region_Ybase"
"Rectangle"
(position    0.0       (- Ybase 0.15) 0.0 )
(position    Xmax       (+ Ybase 0.2) 0.0 ) )
(sdedr:define-multibox-size "MBSize.Region_Ybase"
  0.1 0.05
  0.05  0.02
  1.0 1.35 )
(sdedr:define-refinement-function "MBSize.Region_Ybase"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Region_Ybase"
"MBSize.Region_Ybase" "MBWindow.Region_Ybase" )
;-----------------------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.Region_N+"
"Rectangle"
(position 0.0             0.0          0.0)
(position (- Xem 0.5)    0.25 0.0) )
(sdedr:define-multibox-size "MBSize.Region_N+"
  0.2 0.1
  0.1 0.05
  1.0 1.35  )
(sdedr:define-refinement-function "MBSize.Region_N+"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Region_N+"
"MBSize.Region_N+" "MBWindow.Region_N+" )
;--------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.N1"
"Rectangle"
(position       0.0                (* Ybase 0.5) 0.0 )
(position    (+ Xem 0.5)          (- Ybase  0.15) 0.0  ) )
(sdedr:define-multibox-size "MBSize.N1"
  0.1 0.6
  0.02  0.03
  1.0 1.35)
(sdedr:define-refinement-function "MBSize.N1"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.N1"
"MBSize.N1" "MBWindow.N1" )
;------------------------------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.P_base"
"Rectangle"
(position       (+ Xem 0.5)       0.0          0.0 )
(position       Xmax          (- Ybase  0.15) 0.0  ) )
(sdedr:define-multibox-size "MBSize.P_base"
  0.2 0.1
  0.1 0.05
  1.0 1.35)
(sdedr:define-refinement-function "MBSize.P_base"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.P_base"
"MBSize.P_base" "MBWindow.P_base" )
;-------------------------------------------
(sdedr:define-refinement-window "MBWindow.Region_N+junction"
"Rectangle"
(position    0.0          0.25          0.0)
(position (- Xem 0.5)    (* Ybase 0.5) 0.0) )
(sdedr:define-multibox-size "MBSize.Region_N+junction"
  0.1 0.02
  0.05 0.02
1.0 1.35 )
(sdedr:define-refinement-function "MBSize.Region_N+junction"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Region_N+junction"
"MBSize.Region_N+junction" "MBWindow.Region_N+junction" )
;---------------------------------------------------------------------
(sdedr:define-refinement-window "MBWindow.Region_N+pjunction"
"Rectangle"
(position (- Xem 0.5)          0.0          0.0  )
(position (+ Xem 0.5)       (* Ybase 0.5)       0.0 ) )
(sdedr:define-multibox-size "MBSize.Region_N+pjunction"
  0.1 0.05
  0.05 0.02
  1.0 1.35 )
(sdedr:define-refinement-function "MBSize.Region_N+pjunction"
  "DopingConcentration" "MaxTransDiff" 1)
(sdedr:define-multibox-placement "MBPlace.Region_N+pjunction"
"MBSize.Region_N+pjunction" "MBWindow.Region_N+pjunction" )
;Build mesh
;(system:command " snmesh bjt_msh")
(sde:build-mesh "snmesh" " " "n1_msh")

DEVICE BJT  {
File {
* input files:
Grid= "@tdr@"
Parameter="@parameter@"
* output files:
Plot= "@tdrdat@"
Current="@plot@"
}
electrode {
   { name="emitter"       voltage=0.0 }
   { name= "base"          voltage=0.0 }
   { name= "collector"    voltage=0.0 }
}
Thermode{
   { Name="collector"  Temperature= 300  SurfaceResistance=5e-4 }
}
}
File {
   Output= "@log@"
}
System{
      Vsource_pset Vdd (dd 0) { dc=0.0 }
      Vsource_pset Vcc (c 0)  { sine = (0.0  2.5  1e+9  0.0  0.0) }
      Resistor_pset  Rb  (dd b)  {resistance =20k}
      Resistor_pset  Rc  (dd c)  {resistance =300}
      BJT bjt ("emitter"=0  "base"=b  "collector"=c )
}
Physics(MaterialInterface="Silicon/Oxide"){
charge(surfconc=5.e10)
Traps(Conc=5 EnergyMid=0 Acceptor #FixedCharge
)
}
Physics{
Recombination(SRH(DopingDep TempDep) Auger Avalanche)
Mobility(DopingDep CarrierCarrierScattering HighFieldSaturation)
EffectiveIntrinsicDensity(Slotboom)
Thermodynamic
AnalTEP
}
Plot{
eDensity hDensity
eCurrent/Vector hCurrent/Vector Current/Vector
eAvalanche hAvalanche
eVelocity/Vector hVelocity/Vector eMobility hMobility
eLifetime hLifetime
LatticeTemperature
ElectricField/Vector
eQuasiFermi hQuasiFermi
Potential Doping SpaceCharge
SRH Auger Avalanche
DonorConcentration AcceptorConcentration
EffectiveIntrinsicDensity
TotalHeat eJouleHeat hJouleHeat RecombinationHeat ThomsonHeat
}
Math {
Derivatives
Avalderivative
NoCheckTransientError
Extrapolate
BreakCriteria{LatticeTemperature (maxval=1688)}
RelErrControl
Notdamped=50
Iterations=50
}
solve {
   Poisson
   Coupled { Poisson Electron }
   Coupled { Poisson Electron Hole }
   Coupled { Poisson Electron Hole Temperature }
   Quasistationary( InitialStep=0.1 MaxStep=0.25 MinStep=0.0001
                  increment=1.5 Goal{ Parameter=Vdd.dc Voltage= 9.0} )
            { coupled { poisson electron hole } }

   NewCurrentPrefix="transient_"
      Transient ( InitialStep=5e-10 MaxStep=1e-9 MinStep=5e-13 Increment=1.5
               InitialTime=0    FinalTime= 100e-9 )
         { Coupled { Poisson Electron Hole Temperature }

            Plot (Time=(9.8e-9; 20e-9 ) noOverwrite)}
}