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ABSTRACT
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您需要 登录 才可以下载或查看,没有账号?注册  This paper describes "Process HJ" a new high speed,
 low power complementary bipolar technology suitable for
 RF applications, which features high frequency NPN and
 PNP transistors of 30GHz and 20GHz, respectively. The
 technology uses fully isolated double polysilicon selfaligned
 architecture and 0.6μm emitters. Resistors,
 capacitors, inductors and 3 levels of metallisation are also
 incorporated.
 
 
 
 
  Process_HJ_A_30GHz_NPN_and_20GHz_PNP_Complementary_Bipolar_Process_for_HighLinearityRFCircuits.pdf
            
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