Optical Lithography: Here is Why By Burn J. Lin

hi_china59 · 发表于 2013-7-27 00:08:28

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Optical Lithography: Here is Why By Burn J. Lin
2010
ISBN: 0819475602

This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future.

waveguides · 发表于 2013-7-27 14:21:17

听起来很不错，就是不知道有没有最新的技术

xuleiwx · 发表于 2013-7-28 22:58:14

是个专著，看看。

jacob258 · 发表于 2013-7-28 22:59:41

多谢大侠分享

alenanderson · 发表于 2014-3-20 15:48:58

多谢大侠分享

widespace_ · 发表于 2015-1-2 23:16:24

太谢谢了，真是要好好学习

zhaoshukun · 发表于 2015-8-15 16:13:13

书还行吧

muxl1 · 发表于 2015-9-14 16:50:17

了解一下

bodaolighter · 发表于 2015-11-19 15:29:10

找了好久，多谢分享。
之前下的缺一部分，不知道这个全不全

muxl · 发表于 2016-2-21 22:28:04

看看了

[资料] Optical Lithography: Here is Why By Burn J. Lin

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