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Layout Styles to Improve CDM ESD Robustness 
of Integrated Circuits in 65-nm CMOS Process 
 
Ming-Dou Ker1,2, Chun-Yu Lin1, and Tang-Long Chang1 
1 Institute of Electronics, National Chiao-Tung University, Hsinchu, Taiwan. 
2 Department of Electronic Engineering, I-Shou University, Kaohsiung, Taiwan 
 
Abstract – Due to the thinner gate oxide in the nanoscale CMOS 
technology and the larger chip size in the system-on-chip (SoC) IC 
products, the charged-device-model (CDM) electrostatic discharge 
(ESD) has become the major ESD events to cause failures during IC 
manufacturing procedures. The effective ESD protection design 
against CDM ESD stresses should be implemented into the chip with 
layout optimization to improve its ESD robustness. In this work, the 
impacts of different layout styles of MOS devices on CDM ESD 
robustness were investigated in a 65-nm CMOS process. The 
experimental results can provide useful information to optimize the 
layout of integrated circuits against CDM ESD events. |   
 
 
 
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