光刻行业国外牛书

zhaodz · 发表于 2010-8-10 15:30:32

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Field Guide to Optical Lithography by Chris A. Mack
Principles of Lithography, Second Edition by Harry J. Levinson
Optical Imaging in Projection Microlithography by Alfred K. K. Wong
Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi (Editor) and Robert Doering (Editor)
[size=-1]Handbook of Microlithography, Micromachining, & Microfabrication : Microlithography [size=-1]by P. Rai-Choudhury (Editor), J. Lin Burn (Introduction)
[size=-1]Lithography Process Control (Tutorial Texts in Optical Engineering, Vol Tt 28) by Harry J. Levinson
[size=-1]Microlithography: Science and Technology by James R. Sheats (Editor), Bruce W. Smith (Editor)
[size=-1]Semiconductor Lithography : Principles, Practices, and Materials (Microdevices : Physics and Fabrication Technologies) by Wayne M. Moreau (out of print)

[size=-1]Optics and Physics
[size=-1]Classical Electrodynamics [size=-1]by John David Jackson
[size=-1]Fourier Series and Optical Transform Techniques in Contemporary Optics : An Introduction by Raymond G. Wilson
[size=-1]Introduction to Fourier Optics by Joseph W. Goodman
[size=-1]The New Physical Optics Notebook : Tutorials in Fourier Optics by George O. Reynolds, John B. Develis, George B. Parrent, Brian J. Thompson (Editor) (out of print)
[size=-1]Optical Physics by S.G. Lipson, H. Lipson, D.S. Tannhauser (paperback edition also available) [size=-1]Principles of Optics : Electromagnetic Theory of Propagation, Interference and Diffraction of Light by Max Born, Emil Wolf
[size=-1]Statistical Optics by Joseph W. Goodman

harry1862pd · 发表于 2010-8-10 16:12:37

Extract

harry1862pd · 发表于 2010-8-10 17:28:38

Extract

hadeslb · 发表于 2010-8-11 07:38:57

哎呦不错哦，顶一个先。

kylinchan · 发表于 2010-8-11 14:33:03

果然很牛，谢谢

alexpanait · 发表于 2010-8-11 15:07:53

dddddddddddd

lihongpengtd · 发表于 2010-8-15 20:17:03

有的下吗？

uvwxy · 发表于 2010-8-16 00:52:58

好资料
谢谢分享

cschiu · 发表于 2010-8-16 11:08:17

好像不能下

jmf · 发表于 2020-12-31 10:45:58

@book{mack2008fundamental,
  title={Fundamental principles of optical lithography: the science of microfabrication},
  author={Mack, Chris},
  year={2008},
  publisher={John Wiley \& Sons}
}

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