光刻行业国外牛书

zhaodz

Field Guide to Optical Lithography by Chris A. Mack
Principles of Lithography, Second Edition by Harry J. Levinson
Optical Imaging in Projection Microlithography by Alfred K. K. Wong
Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi (Editor) and Robert Doering (Editor)
[size=-1]Handbook of Microlithography, Micromachining, & Microfabrication : Microlithography [size=-1]by P. Rai-Choudhury (Editor), J. Lin Burn (Introduction)
[size=-1]Lithography Process Control (Tutorial Texts in Optical Engineering, Vol Tt 28) by Harry J. Levinson
[size=-1]Microlithography: Science and Technology by James R. Sheats (Editor), Bruce W. Smith (Editor)
[size=-1]Semiconductor Lithography : Principles, Practices, and Materials (Microdevices : Physics and Fabrication Technologies) by Wayne M. Moreau (out of print)

[size=-1]Optics and Physics
[size=-1]Classical Electrodynamics [size=-1]by John David Jackson
[size=-1]Fourier Series and Optical Transform Techniques in Contemporary Optics : An Introduction by Raymond G. Wilson
[size=-1]Introduction to Fourier Optics by Joseph W. Goodman
[size=-1]The New Physical Optics Notebook : Tutorials in Fourier Optics by George O. Reynolds, John B. Develis, George B. Parrent, Brian J. Thompson (Editor) (out of print)
[size=-1]Optical Physics by S.G. Lipson, H. Lipson, D.S. Tannhauser (paperback edition also available) [size=-1]Principles of Optics : Electromagnetic Theory of Propagation, Interference and Diffraction of Light by Max Born, Emil Wolf
[size=-1]Statistical Optics by Joseph W. Goodman

harry1862pd

Extract

harry1862pd

Extract

hadeslb

哎呦 不错哦，顶一个先。

kylinchan

果然很牛，谢谢

alexpanait

dddddddddddd

lihongpengtd

有的下吗？

uvwxy

好资料
谢谢分享

cschiu

好像不能下

jmf

@book{mack2008fundamental,
  title={Fundamental principles of optical lithography: the science of microfabrication},
  author={Mack, Chris},
  year={2008},
  publisher={John Wiley \& Sons}
}