Sentaurus TCAD 可制造性设计

darklord111

谢谢！

箫男

非常感谢啊

zheng2009

Thanks a lot!

zheng2009

谢谢！！！

306836621

这本书已有 谢谢分享

weihang08

;----------------------------------------------------------------------;
; vertical dimensions
(define hAlN      0.100)
(define hGaN      2.000)
(define hAlGaN    0.025)
(define hPass     0.050)

; horizontal dimensions
(define Xmin     -3.500)
(define SrcLngth  1.000)
(define DrnLngth  1.000)
(define GtLngth   1.100)
(define SrcSep    1.500)
(define DrnSep    2.400)

; Ohmic contact definitions
(define Sep       0.00)
(define Dpng      1E20)

; Molefraction definition
(define x_AlGaN  @x@)

;----------------------------------------------------------------------;
; Derived quantities
;----------------------------------------------------------------------;
(define Xmax    (+ Xmin SrcLngth SrcSep GtLngth DrnSep DrnLngth))
(define Ymax    (+ hGaN))
(define Ymin    (- 0 hAlGaN hPass))
(define Ysrfc   (- 0 hAlGaN))
(define Yjnctn  (- 0 Sep))

(define Xsrc    (+ Xmin SrcLngth))
(define XgtLft  (+ Xsrc SrcSep))
(define XgtRght (+ XgtLft GtLngth))
(define Xdrn    (+ XgtRght DrnSep))

;----------------------------------------------------------------------;
; Create structure
;----------------------------------------------------------------------;
(sdegeo:create-rectangle (position Xsrc Ymin 0)  (position XgtLft Ysrfc 0) "Nitride" "LeftPassivation" )
(sdegeo:create-rectangle (position XgtRght Ymin 0)  (position Xdrn Ysrfc 0) "Nitride" "RightPassivation" )
(sdegeo:create-rectangle (position Xmin Ysrfc 0)  (position Xmax 0 0) "AlGaN" "AlGaN_barrier" )
(sdegeo:create-rectangle (position Xmin 0 0)  (position Xmax Ymax 0) "GaN" "GaN_bulk" )

; --------------------------------------------------------------------------------
; Place AlGaN mole fraction
; --------------------------------------------------------------------------------
(sdedr:define-constant-profile "CP.xMole" "xMoleFraction" x_AlGaN)
(sdedr:define-constant-profile-material "CP.xMole" "CP.xMole" "AlGaN" 0 0 "Replace")

; --------------------------------------------------------------------------------
; Place doping profiles to emulate metal spikes
; --------------------------------------------------------------------------------
(sdedr:define-refinement-window "Pl.Source" "Rectangle" (position Xmin Ysrfc 0) (position Xsrc Yjnctn 0))
(sdedr:define-constant-profile "P.source" "PhosphorusActiveConcentration" Dpng)
(sdedr:define-constant-profile-placement "P.source" "P.source" "Pl.Source")

(sdedr:define-refinement-window "Pl.Drain" "Rectangle" (position Xdrn Ysrfc 0) (position Xmax Yjnctn 0))
(sdedr:define-constant-profile "P.drain" "PhosphorusActiveConcentration" Dpng)
(sdedr:define-constant-profile-placement "P.drain" "P.drain" "Pl.Drain")

; --------------------------------------------------------------------------------
; Create and place all electrodes
; --------------------------------------------------------------------------------
(sdegeo:define-contact-set "source")
(sdegeo:set-current-contact-set "source")
(sdegeo:set-contact-edges (find-edge-id (position (+ Xmin 0.001) Ysrfc 0)))

(sdegeo:define-contact-set "gate")
(sdegeo:set-current-contact-set "gate")
(sdegeo:set-contact-edges (find-edge-id (position (+ XgtLft 0.001) Ysrfc 0)))
(sdegeo:set-contact-edges (find-edge-id (position (* 0.5 (+ XgtLft XgtRght)) Ysrfc 0)))
(sdegeo:set-contact-edges (find-edge-id (position (- XgtRght 0.001) Ysrfc 0)))

(sdegeo:define-contact-set "drain")
(sdegeo:set-current-contact-set "drain")
(sdegeo:set-contact-edges (find-edge-id (position (+ Xdrn 0.001) Ysrfc 0)))


; --------------------------------------------------------------------------------
; Grid refinement definitions
; --------------------------------------------------------------------------------
(sdedr:define-refinement-window "Pl.Default" "Rectangle" (position Xmin Ymin 0) (position Xmax Ymax 0))
(sdedr:define-refinement-size "Ref.Default" 0.4 0.2 99 0.01 0.01 66 )
(sdedr:define-refinement-placement "Ref.Default" "Ref.Default" "Pl.Default" )
(sdedr:define-refinement-function "Ref.Default" "DopingConcentration" "MaxTransDiff" 1)

(sdedr:define-refinement-window "Pl.eDensity" "Rectangle"
  (position (- XgtRght 0.05) Ymin 0)
  (position (+ XgtRght 0.3)   0.1 0))
(sdedr:define-refinement-size "Ref.eDensity" 0.01 99 99 0.005 66 66 )
(sdedr:define-refinement-placement "Ref.eDensity" "Ref.eDensity" "Pl.eDensity" )

(sdedr:define-refinement-window "Pl.channel_h" "Rectangle"  
  (position (- XgtLft 0.1) Ymin 0)
  (position (+ XgtRght 1)   0.1 0))
(sdedr:define-refinement-size "Ref.channel_h" 0.15 99 99 0.01 66 66 )
(sdedr:define-refinement-placement "Ref.channel_h" "Ref.channel_h" "Pl.channel_h" )

(sdedr:define-refinement-window "Pl.drain_c" "Rectangle"
  (position (- XgtRght 0.2) Ymin 0)
  (position (+ XgtRght 0.7)   0  0))
(sdedr:define-refinement-size "Ref.drain_c" 0.08 99 99 0.01 66 66 )
(sdedr:define-refinement-placement "Ref.drain_c" "Ref.drain_c" "Pl.drain_c" )

(sdedr:define-refinement-window "Pl.contact_r" "Rectangle"
  (position (- XgtRght 0.005) Ymin 0)
  (position (+ XgtRght 0.05)   0.1 0))
(sdedr:define-refinement-size "Ref.contact_r" 0.005 99 99 0.001 66 66 )
(sdedr:define-refinement-placement "Ref.contact_r" "Ref.contact_r" "Pl.contact_r" )

(sdedr:define-refinement-window "Pl.contact_l" "Rectangle"
   (position (- XgtLft 0.005) Ymin 0)
   (position (+ XgtLft 0.005) 0.1  0))
(sdedr:define-refinement-size "Ref.contact_l" 0.005 99 99 0.001 66 66 )
(sdedr:define-refinement-placement "Ref.contact_l" "Ref.contact_l" "Pl.contact_l" )

(sdedr:define-refinement-window "Pl.surface" "Rectangle"
  (position Xmin Ysrfc 0)
  (position Xmax 0 0))
(sdedr:define-multibox-size "MB.surface" 99 0.1 99 66 0.001 66 1 2 1 )
(sdedr:define-multibox-placement "MB.surface" "MB.surface" "Pl.surface" )

(sdedr:define-multibox-size "MB.barrier" 99 0.1 99 66 0.0004 66 1 -2 1 )
(sdedr:define-multibox-placement "MB.barrier" "MB.barrier" "Pl.surface" )

(sdedr:define-refinement-window "Pl.surface_Pol" "Rectangle"  (position Xmin Ysrfc 0) (position Xmax (+ Ysrfc 0.0001) 0))
(sdedr:define-multibox-size "MB.surface_Pol" 99 0.1 99 66 0.0002 66 1 4 1 )
(sdedr:define-multibox-placement "MB.surface_Pol" "MB.surface_Pol" "Pl.surface_Pol" )

(sdedr:define-refinement-window "Pl.channel" "Rectangle"
  (position Xmin    0 0)
  (position Xmax hGaN 0))
(sdedr:define-multibox-size "MB.channel" 99 0.2 99 66 0.0004 66 1 1.5 1 )
(sdedr:define-multibox-placement "MB.channel" "MB.channel" "Pl.channel" )

(sdeaxisaligned:set-parameters "yCuts"
   (list -0.025 -0.0249 -5e-5 0 5e-5)
)


;--- Generate and save the mesh using Mesh
(sde:build-mesh "snmesh" "" "n@node@_msh")

jackchen012

xiexie louzhu

alancatrz

多谢楼主分享，好人一生平安

llhorse

下亏了，太模糊！

tttttt5566

good!