Advances in Multiphysics Simulation and Experimental Testing of MEMS

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Advances in Multiphysics Simulation and Experimental Testing of MEMS

Contents
Preface v
1. Challenges in Modeling Liquid and Gas Flows in Micro/Nano
Devices 1
M. Gad-el-Hak
2. Using the Kinetic Equations for MEMS and NEMS 37
C. Cercignani, A. Frezzotti and S. Lorenzani
3. Applying the Direct Simulation Monte Carlo (DSMC)
Method to Gas-Filled MEMS Devices 81
M. A. Gallis
4. New Approaches for the Simulation of Micro-Fluidics
in MEMS 121
T. Y. Ng, H. Li, L. S. Pan, D. Xu and K. Y. Lam
5. Evaluating Gas Damping in MEMS Using Fast Integral
Equation Solvers 153
A. Frangi, W. Ye and J. White
6. Experimental Techniques for Damping Characterization of
Micro and Nanostructures 183
A. Bosseboeuf and H. Mathias
7. Nonlinear Dynamics of Electrostatically Actuated MEMS 235
S. K. De and N. R. Aluru
8. Coupled Deformation Analysis of Thin MEMS Plates 287
S. Mukherjee and S. Telukunta
9. Pull-In Instability in Electrostatically Actuated MEMS due to
Coulomb and Casimir Forces 329
R. C. Batra, M. Porfiri and D. Spinello
10. Numerical Simulation of BioMEMS with Dielectrophoresis 375
G. R. Liu and C. X. Song
11. Continuous Modeling of Multi-Physics Problems of
Microsystems for Topology Optimization 399
G. K. Ananthasuresh
12. Mechanical Characterization of Polysilicon at the Micro-
Scale Through On-Chip Tests 427
A. Corigliano, F. Cacchione, A. Frangi, S. Zerbini and M. Ferrera
13. Nano-Scale Testing of Nanowires and Carbon Nanotubes
Using a Micro-Electro-Mechanical System 455
H. D. Espinosa, Y. Zhu, B. Peng and O. Loh

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Advances in Multiphysics Simulation and Experimental Testing of MEMS