Microfabrication and Nanomanufacturing

playball · 发表于 2009-10-27 18:20:33

马上注册，结交更多好友，享用更多功能，让你轻松玩转社区。

您需要登录才可以下载或查看，没有账号？注册

x

Contents
Chapter 1 Micro- and Nanofabrication .........................................................................................1
Mark J. Jackson
Chapter 2 Microfabrication Using X-Ray Lithography..............................................................33
David W. L. Tolfree and Mark J. Jackson
Chapter 3 Etching, Machining, and Molding High-Aspect
Ratio Microstructures .................................................................................................59
Mark J. Jackson and Grant M. Robinson
Chapter 4 The Size Effect in Micromachining...........................................................................87
Milton C. Shaw and Mark J. Jackson
Chapter 5 Mechanical Micromachining....................................................................................111
Mark J. Jackson and Sam B. McSpadden
Chapter 6 Precision Micro- and Nanogrinding .......................................................................143
Vellore C. Venkatesh, Sudin Izman, and Mark J. Jackson
Chapter 7 CVD Diamond Technology for Microtools, NEMS,
and MEMS Applications .........................................................................................187
Waqar Ahmed, Htet Sein, and Mark J. Jackson
Chapter 8 Laser-Based Micro- and Nanofabrication................................................................221
Mark J. Jackson and Grant M. Robinson
Chapter 9 Pulsed Water Drop Micromachining........................................................................249
Mark J. Jackson and Luke J. Hyde
Chapter 10 Diamond Nanogrinding............................................................................................277
Mark J. Jackson, Luke J. Hyde, and Grant M. Robinson
Chapter 11 Nanometric Machining:
Theory, Methods, and Implementation ....................................................................311
Kai Cheng, Xun Luo, and Mark J. Jackson
Chapter 12 Nanocrystalline Diamond:
Deposition Routes and Applications........................................................................339
Nasar Ali, Juan Gracio, Mark J. Jackson, and Waqar Ahmed
Chapter 13 Commercialization Issues of Micro-Nano Technology ...........................................359
David W. L. Tolfree
Chapter 14 The Future of Micro- and Nanomanufacturing .......................................................367
Mark J. Jackson